JPH01129044U - - Google Patents
Info
- Publication number
- JPH01129044U JPH01129044U JP2326588U JP2326588U JPH01129044U JP H01129044 U JPH01129044 U JP H01129044U JP 2326588 U JP2326588 U JP 2326588U JP 2326588 U JP2326588 U JP 2326588U JP H01129044 U JPH01129044 U JP H01129044U
- Authority
- JP
- Japan
- Prior art keywords
- rotary shaft
- arm
- magnetic chuck
- brush
- robot cylinder
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007664 blowing Methods 0.000 claims 1
- 238000004140 cleaning Methods 0.000 description 2
Landscapes
- Auxiliary Devices For Machine Tools (AREA)
- Combined Means For Separation Of Solids (AREA)
Description
第１図は作業位置にある清掃装置を一部断面で
示した図、第２図は待機位置にある清掃装置の正
面図である。
３…面板、７…ロボツトシリンダ、１１…ブラ
シ、１３…エアモータ、１６…エアノズル。
FIG. 1 is a partially sectional view of the cleaning device in the working position, and FIG. 2 is a front view of the cleaning device in the standby position. 3... Face plate, 7... Robot cylinder, 11... Brush, 13... Air motor, 16... Air nozzle.
Claims (1)
として旋回と軸方向移動可能なロボツトシリンダ
７と、該ロボツトシリンダ７の出力軸８に直角に
固定されたアーム９と、該アーム９の端に回転可
能に軸承された回転軸１０と、該回転軸１０のマ
グネツトチヤツク２側に取付けられた円板形ブラ
シ１１と、前記アーム９の他端に設けられ前記回
転軸１０を回転させる駆動モータ１３と、前記ブ
ラシ１１による摺擦面をエアブローするエアノズ
ル１６とを含んでなることを特徴とするマグネツ
トチヤツク吸着面清掃装置。 A robot cylinder 7 that can rotate and move in the axial direction about an axis parallel to the axis of the magnetic chuck 2, an arm 9 fixed at right angles to an output shaft 8 of the robot cylinder 7, and a A rotary shaft 10 rotatably supported, a disc-shaped brush 11 attached to the magnetic chuck 2 side of the rotary shaft 10, and a drive motor provided at the other end of the arm 9 for rotating the rotary shaft 10. 13; and an air nozzle 16 for blowing air against the surface rubbed by the brush 11.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2326588U JPH01129044U (en) | 1988-02-24 | 1988-02-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2326588U JPH01129044U (en) | 1988-02-24 | 1988-02-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01129044U true JPH01129044U (en) | 1989-09-04 |
Family
ID=31242106
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2326588U Pending JPH01129044U (en) | 1988-02-24 | 1988-02-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01129044U (en) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5851906B2 (en) * | 1979-08-17 | 1983-11-18 | 松下電器産業株式会社 | Method for manufacturing target porcelain for high frequency sputtering |
| JPS60123247A (en) * | 1983-12-07 | 1985-07-01 | Seiko Seiki Co Ltd | Device for cleaning reference surface on which workpiece seats in spindle device |
-
1988
- 1988-02-24 JP JP2326588U patent/JPH01129044U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5851906B2 (en) * | 1979-08-17 | 1983-11-18 | 松下電器産業株式会社 | Method for manufacturing target porcelain for high frequency sputtering |
| JPS60123247A (en) * | 1983-12-07 | 1985-07-01 | Seiko Seiki Co Ltd | Device for cleaning reference surface on which workpiece seats in spindle device |