JPS5370047A - Preparation of target material for sputtering - Google Patents
Preparation of target material for sputteringInfo
- Publication number
- JPS5370047A JPS5370047A JP14539176A JP14539176A JPS5370047A JP S5370047 A JPS5370047 A JP S5370047A JP 14539176 A JP14539176 A JP 14539176A JP 14539176 A JP14539176 A JP 14539176A JP S5370047 A JPS5370047 A JP S5370047A
- Authority
- JP
- Japan
- Prior art keywords
- sputtering
- preparation
- target material
- target
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Powder Metallurgy (AREA)
- Physical Vapour Deposition (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP51145391A JPS58511B2 (en) | 1976-12-02 | 1976-12-02 | Manufacturing method of target material for sputtering |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP51145391A JPS58511B2 (en) | 1976-12-02 | 1976-12-02 | Manufacturing method of target material for sputtering |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5370047A true JPS5370047A (en) | 1978-06-22 |
JPS58511B2 JPS58511B2 (en) | 1983-01-06 |
Family
ID=15384160
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP51145391A Expired JPS58511B2 (en) | 1976-12-02 | 1976-12-02 | Manufacturing method of target material for sputtering |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS58511B2 (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS55154551A (en) * | 1979-05-18 | 1980-12-02 | Mitsubishi Metal Corp | Manufacture of high chromium alloy material |
JPH06280006A (en) * | 1993-03-26 | 1994-10-04 | Agency Of Ind Science & Technol | Target for producing superconducting thin film, its production, and production of superconducting material using the target |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0311933Y2 (en) * | 1984-11-05 | 1991-03-22 | ||
US6248291B1 (en) * | 1995-05-18 | 2001-06-19 | Asahi Glass Company Ltd. | Process for producing sputtering targets |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4844611A (en) * | 1971-10-06 | 1973-06-27 | ||
JPS4995809A (en) * | 1972-11-16 | 1974-09-11 | ||
JPS49129606A (en) * | 1973-04-17 | 1974-12-12 | ||
JPS5110677A (en) * | 1974-07-17 | 1976-01-28 | Nippon Steel Corp | Haikibutsushoriro |
JPS51100913A (en) * | 1975-02-03 | 1976-09-06 | Asea Ab |
-
1976
- 1976-12-02 JP JP51145391A patent/JPS58511B2/en not_active Expired
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4844611A (en) * | 1971-10-06 | 1973-06-27 | ||
JPS4995809A (en) * | 1972-11-16 | 1974-09-11 | ||
JPS49129606A (en) * | 1973-04-17 | 1974-12-12 | ||
JPS5110677A (en) * | 1974-07-17 | 1976-01-28 | Nippon Steel Corp | Haikibutsushoriro |
JPS51100913A (en) * | 1975-02-03 | 1976-09-06 | Asea Ab |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS55154551A (en) * | 1979-05-18 | 1980-12-02 | Mitsubishi Metal Corp | Manufacture of high chromium alloy material |
JPS6058289B2 (en) * | 1979-05-18 | 1985-12-19 | 三菱マテリアル株式会社 | Manufacturing method of high chromium alloy material |
JPH06280006A (en) * | 1993-03-26 | 1994-10-04 | Agency Of Ind Science & Technol | Target for producing superconducting thin film, its production, and production of superconducting material using the target |
Also Published As
Publication number | Publication date |
---|---|
JPS58511B2 (en) | 1983-01-06 |
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