JPS5626891B2 - - Google Patents

Info

Publication number
JPS5626891B2
JPS5626891B2 JP4541276A JP4541276A JPS5626891B2 JP S5626891 B2 JPS5626891 B2 JP S5626891B2 JP 4541276 A JP4541276 A JP 4541276A JP 4541276 A JP4541276 A JP 4541276A JP S5626891 B2 JPS5626891 B2 JP S5626891B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP4541276A
Other languages
Japanese (ja)
Other versions
JPS52129409A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4541276A priority Critical patent/JPS52129409A/ja
Publication of JPS52129409A publication Critical patent/JPS52129409A/ja
Publication of JPS5626891B2 publication Critical patent/JPS5626891B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/225—Oblique incidence of vaporised material on substrate
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)
  • Thin Magnetic Films (AREA)
JP4541276A 1976-04-23 1976-04-23 Manufacture of magnetic recording medium Granted JPS52129409A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4541276A JPS52129409A (en) 1976-04-23 1976-04-23 Manufacture of magnetic recording medium

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4541276A JPS52129409A (en) 1976-04-23 1976-04-23 Manufacture of magnetic recording medium

Publications (2)

Publication Number Publication Date
JPS52129409A JPS52129409A (en) 1977-10-29
JPS5626891B2 true JPS5626891B2 (enrdf_load_stackoverflow) 1981-06-22

Family

ID=12718533

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4541276A Granted JPS52129409A (en) 1976-04-23 1976-04-23 Manufacture of magnetic recording medium

Country Status (1)

Country Link
JP (1) JPS52129409A (enrdf_load_stackoverflow)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5360205A (en) * 1976-11-10 1978-05-30 Matsushita Electric Ind Co Ltd Magnetic recording medium and its manufacture
JPS5387706A (en) * 1977-01-12 1978-08-02 Matsushita Electric Ind Co Ltd Manufacture of magnetic recording medium
JPS6058525B2 (ja) * 1979-08-06 1985-12-20 日本真空技術株式会社 磁気記録体の記録再生法
JPS5792402A (en) * 1980-11-25 1982-06-09 Fuji Photo Film Co Ltd Magnetic recording and reproducing method
JPS5792401A (en) * 1980-11-25 1982-06-09 Fuji Photo Film Co Ltd Magnetic recording and reproducing method
JPS5956718A (ja) * 1982-09-25 1984-04-02 Hitachi Condenser Co Ltd 蒸着装置

Also Published As

Publication number Publication date
JPS52129409A (en) 1977-10-29

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