JPS5624203B2 - - Google Patents
Info
- Publication number
- JPS5624203B2 JPS5624203B2 JP12541375A JP12541375A JPS5624203B2 JP S5624203 B2 JPS5624203 B2 JP S5624203B2 JP 12541375 A JP12541375 A JP 12541375A JP 12541375 A JP12541375 A JP 12541375A JP S5624203 B2 JPS5624203 B2 JP S5624203B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/956—Inspecting patterns on the surface of objects
- G01N21/95623—Inspecting patterns on the surface of objects using a spatial filtering method
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Character Discrimination (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP50125413A JPS5250285A (en) | 1975-10-20 | 1975-10-20 | Apparatus for inspecting defects of patterns having directional charac teristics |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP50125413A JPS5250285A (en) | 1975-10-20 | 1975-10-20 | Apparatus for inspecting defects of patterns having directional charac teristics |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5250285A JPS5250285A (en) | 1977-04-22 |
| JPS5624203B2 true JPS5624203B2 (en, 2012) | 1981-06-04 |
Family
ID=14909482
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP50125413A Granted JPS5250285A (en) | 1975-10-20 | 1975-10-20 | Apparatus for inspecting defects of patterns having directional charac teristics |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5250285A (en, 2012) |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5077082A (en, 2012) * | 1973-11-08 | 1975-06-24 |
-
1975
- 1975-10-20 JP JP50125413A patent/JPS5250285A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5250285A (en) | 1977-04-22 |