JPS5077082A - - Google Patents
Info
- Publication number
- JPS5077082A JPS5077082A JP48124959A JP12495973A JPS5077082A JP S5077082 A JPS5077082 A JP S5077082A JP 48124959 A JP48124959 A JP 48124959A JP 12495973 A JP12495973 A JP 12495973A JP S5077082 A JPS5077082 A JP S5077082A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Character Discrimination (AREA)
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP48124959A JPS5077082A (en, 2012) | 1973-11-08 | 1973-11-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP48124959A JPS5077082A (en, 2012) | 1973-11-08 | 1973-11-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5077082A true JPS5077082A (en, 2012) | 1975-06-24 |
Family
ID=14898441
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP48124959A Pending JPS5077082A (en, 2012) | 1973-11-08 | 1973-11-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5077082A (en, 2012) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5250285A (en) * | 1975-10-20 | 1977-04-22 | Toshiba Corp | Apparatus for inspecting defects of patterns having directional charac teristics |
| JPS5250284A (en) * | 1975-10-20 | 1977-04-22 | Toshiba Corp | Apparatus for inspecting defects of patterns having directional charac teristics |
| JPS56132508A (en) * | 1980-03-22 | 1981-10-16 | Toshiba Corp | Pattern measuring device |
-
1973
- 1973-11-08 JP JP48124959A patent/JPS5077082A/ja active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5250285A (en) * | 1975-10-20 | 1977-04-22 | Toshiba Corp | Apparatus for inspecting defects of patterns having directional charac teristics |
| JPS5250284A (en) * | 1975-10-20 | 1977-04-22 | Toshiba Corp | Apparatus for inspecting defects of patterns having directional charac teristics |
| JPS56132508A (en) * | 1980-03-22 | 1981-10-16 | Toshiba Corp | Pattern measuring device |