JPS5622952B2 - - Google Patents
Info
- Publication number
- JPS5622952B2 JPS5622952B2 JP7092975A JP7092975A JPS5622952B2 JP S5622952 B2 JPS5622952 B2 JP S5622952B2 JP 7092975 A JP7092975 A JP 7092975A JP 7092975 A JP7092975 A JP 7092975A JP S5622952 B2 JPS5622952 B2 JP S5622952B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7092975A JPS51147484A (en) | 1975-06-13 | 1975-06-13 | A penning discharge sputter film forming apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7092975A JPS51147484A (en) | 1975-06-13 | 1975-06-13 | A penning discharge sputter film forming apparatus |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14571780A Division JPS5833306B2 (ja) | 1980-10-20 | 1980-10-20 | 格子状スパツタタ−ゲツトを有するペニング放電スパツタ被膜形成装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS51147484A JPS51147484A (en) | 1976-12-17 |
| JPS5622952B2 true JPS5622952B2 (en:Method) | 1981-05-28 |
Family
ID=13445683
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7092975A Granted JPS51147484A (en) | 1975-06-13 | 1975-06-13 | A penning discharge sputter film forming apparatus |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS51147484A (en:Method) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS53109880A (en) * | 1977-03-08 | 1978-09-26 | Ulvac Corp | High speed continuous dry plating appartus |
| JP7369411B1 (ja) * | 2023-02-28 | 2023-10-26 | 株式会社アドバンスト・スパッタテック | スパッタリング成膜源および成膜装置 |
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1975
- 1975-06-13 JP JP7092975A patent/JPS51147484A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS51147484A (en) | 1976-12-17 |