JPS51147484A - A penning discharge sputter film forming apparatus - Google Patents

A penning discharge sputter film forming apparatus

Info

Publication number
JPS51147484A
JPS51147484A JP7092975A JP7092975A JPS51147484A JP S51147484 A JPS51147484 A JP S51147484A JP 7092975 A JP7092975 A JP 7092975A JP 7092975 A JP7092975 A JP 7092975A JP S51147484 A JPS51147484 A JP S51147484A
Authority
JP
Japan
Prior art keywords
forming apparatus
film forming
sputter film
penning discharge
discharge sputter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7092975A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5622952B2 (en:Method
Inventor
Chikara Hayashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ulvac Inc
Original Assignee
Ulvac Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ulvac Inc filed Critical Ulvac Inc
Priority to JP7092975A priority Critical patent/JPS51147484A/ja
Publication of JPS51147484A publication Critical patent/JPS51147484A/ja
Publication of JPS5622952B2 publication Critical patent/JPS5622952B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP7092975A 1975-06-13 1975-06-13 A penning discharge sputter film forming apparatus Granted JPS51147484A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7092975A JPS51147484A (en) 1975-06-13 1975-06-13 A penning discharge sputter film forming apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7092975A JPS51147484A (en) 1975-06-13 1975-06-13 A penning discharge sputter film forming apparatus

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP14571780A Division JPS5833306B2 (ja) 1980-10-20 1980-10-20 格子状スパツタタ−ゲツトを有するペニング放電スパツタ被膜形成装置

Publications (2)

Publication Number Publication Date
JPS51147484A true JPS51147484A (en) 1976-12-17
JPS5622952B2 JPS5622952B2 (en:Method) 1981-05-28

Family

ID=13445683

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7092975A Granted JPS51147484A (en) 1975-06-13 1975-06-13 A penning discharge sputter film forming apparatus

Country Status (1)

Country Link
JP (1) JPS51147484A (en:Method)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53109880A (en) * 1977-03-08 1978-09-26 Ulvac Corp High speed continuous dry plating appartus
WO2024180949A1 (ja) * 2023-02-28 2024-09-06 株式会社アドバンスト・スパッタテック スパッタリング成膜源および成膜装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53109880A (en) * 1977-03-08 1978-09-26 Ulvac Corp High speed continuous dry plating appartus
WO2024180949A1 (ja) * 2023-02-28 2024-09-06 株式会社アドバンスト・スパッタテック スパッタリング成膜源および成膜装置
JP2024121928A (ja) * 2023-02-28 2024-09-09 株式会社アドバンスト・スパッタテック スパッタリング成膜源および成膜装置

Also Published As

Publication number Publication date
JPS5622952B2 (en:Method) 1981-05-28

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