JPS5622368B2 - - Google Patents
Info
- Publication number
- JPS5622368B2 JPS5622368B2 JP14168075A JP14168075A JPS5622368B2 JP S5622368 B2 JPS5622368 B2 JP S5622368B2 JP 14168075 A JP14168075 A JP 14168075A JP 14168075 A JP14168075 A JP 14168075A JP S5622368 B2 JPS5622368 B2 JP S5622368B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P50/00—Etching of wafers, substrates or parts of devices
- H10P50/60—Wet etching
- H10P50/61—Electrolytic etching
- H10P50/613—Electrolytic etching of Group IV materials
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P50/00—Etching of wafers, substrates or parts of devices
- H10P50/60—Wet etching
- H10P50/61—Electrolytic etching
- H10P50/617—Electrolytic etching of Group III-V materials
Landscapes
- Weting (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GB5157474A GB1469005A (en) | 1974-11-28 | 1974-11-28 | Standard telephones cables ltd semiconductor device manufacture |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5177074A JPS5177074A (cg-RX-API-DMAC7.html) | 1976-07-03 |
| JPS5622368B2 true JPS5622368B2 (cg-RX-API-DMAC7.html) | 1981-05-25 |
Family
ID=10460546
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14168075A Expired JPS5622368B2 (cg-RX-API-DMAC7.html) | 1974-11-28 | 1975-11-28 |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JPS5622368B2 (cg-RX-API-DMAC7.html) |
| DE (1) | DE2551444A1 (cg-RX-API-DMAC7.html) |
| GB (1) | GB1469005A (cg-RX-API-DMAC7.html) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6047725B2 (ja) * | 1977-06-14 | 1985-10-23 | ソニー株式会社 | フエライトの加工法 |
| GB8426915D0 (en) * | 1984-10-24 | 1984-11-28 | Marconi Instruments Ltd | Fabricating devices on semiconductor substrates |
| DE3889830D1 (de) * | 1987-09-30 | 1994-07-07 | Siemens Ag | Verfahren zum Ätzen von (100) Silizium. |
| US6401009B1 (en) | 1999-02-16 | 2002-06-04 | Suzette M. Chandonnet | Sundry article vending apparatus |
-
1974
- 1974-11-28 GB GB5157474A patent/GB1469005A/en not_active Expired
-
1975
- 1975-11-15 DE DE19752551444 patent/DE2551444A1/de active Pending
- 1975-11-28 JP JP14168075A patent/JPS5622368B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5177074A (cg-RX-API-DMAC7.html) | 1976-07-03 |
| GB1469005A (en) | 1977-03-30 |
| DE2551444A1 (de) | 1976-08-12 |