JPS5621147B2 - - Google Patents

Info

Publication number
JPS5621147B2
JPS5621147B2 JP11452474A JP11452474A JPS5621147B2 JP S5621147 B2 JPS5621147 B2 JP S5621147B2 JP 11452474 A JP11452474 A JP 11452474A JP 11452474 A JP11452474 A JP 11452474A JP S5621147 B2 JPS5621147 B2 JP S5621147B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP11452474A
Other languages
Japanese (ja)
Other versions
JPS5140874A (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11452474A priority Critical patent/JPS5621147B2/ja
Publication of JPS5140874A publication Critical patent/JPS5140874A/ja
Publication of JPS5621147B2 publication Critical patent/JPS5621147B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • ing And Chemical Polishing (AREA)
JP11452474A 1974-10-04 1974-10-04 Expired JPS5621147B2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11452474A JPS5621147B2 (enrdf_load_stackoverflow) 1974-10-04 1974-10-04

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11452474A JPS5621147B2 (enrdf_load_stackoverflow) 1974-10-04 1974-10-04

Publications (2)

Publication Number Publication Date
JPS5140874A JPS5140874A (enrdf_load_stackoverflow) 1976-04-06
JPS5621147B2 true JPS5621147B2 (enrdf_load_stackoverflow) 1981-05-18

Family

ID=14639899

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11452474A Expired JPS5621147B2 (enrdf_load_stackoverflow) 1974-10-04 1974-10-04

Country Status (1)

Country Link
JP (1) JPS5621147B2 (enrdf_load_stackoverflow)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57147634A (en) * 1981-03-09 1982-09-11 Hoya Corp Photomask blank
JPS628331Y2 (enrdf_load_stackoverflow) * 1981-03-16 1987-02-26
JPS57161727A (en) * 1981-03-30 1982-10-05 Ricoh Co Ltd Manufacture of electrochromatic film
JPS6090336A (ja) * 1983-10-24 1985-05-21 Toppan Printing Co Ltd クロムマスクブランクの製造方法
JPS61170743A (ja) * 1985-01-25 1986-08-01 Toppan Printing Co Ltd フオトマスクブランクの製造法
JPS61176934A (ja) * 1985-01-31 1986-08-08 Toppan Printing Co Ltd フオトマスクブランクの製造方法
JPH0690502B2 (ja) * 1987-07-23 1994-11-14 凸版印刷株式会社 フォトマスクブランクの製造法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3814641A (en) * 1972-07-20 1974-06-04 Instr Inc Process of fabricating silicon photomask
JPS564906B2 (enrdf_load_stackoverflow) * 1972-08-04 1981-02-02

Also Published As

Publication number Publication date
JPS5140874A (enrdf_load_stackoverflow) 1976-04-06

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