JPS5621044A - Temperature modulation apparatus - Google Patents
Temperature modulation apparatusInfo
- Publication number
- JPS5621044A JPS5621044A JP9766079A JP9766079A JPS5621044A JP S5621044 A JPS5621044 A JP S5621044A JP 9766079 A JP9766079 A JP 9766079A JP 9766079 A JP9766079 A JP 9766079A JP S5621044 A JPS5621044 A JP S5621044A
- Authority
- JP
- Japan
- Prior art keywords
- temperature
- heater
- modulation amplitude
- basic
- monitored
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
- Investigating Or Analyzing Materials Using Thermal Means (AREA)
Abstract
PURPOSE: To make the temperature modulation amplitude invariably constant to the temperature fluctuation by varying the temperature of a basic temperature by using the program of a program circuit.
CONSTITUTION: The temperature in a thermostatic chamber 10 is detected by means of a thermocouple 12 and a linearizer 13. Of the detection signal; the basic temperature T component provided by a heater 2 is monitored by a low-pass filter 15, and the temperature modulation amplitude ΔT component provided by a heater 3 is monitored by bypass fiter 14 and an AC/DC converter 16. These monitor signals are input to a main controller 8' and a controller 9' for modulation respectively. The controllers 8' and 9' control power sources 6 and 7 for the heaters respectively so that the basic temperature T by the heater 2 and the temperature modulation amplitude ΔT by the heater 3 approach to preset values.
COPYRIGHT: (C)1981,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9766079A JPS5621044A (en) | 1979-07-31 | 1979-07-31 | Temperature modulation apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9766079A JPS5621044A (en) | 1979-07-31 | 1979-07-31 | Temperature modulation apparatus |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5621044A true JPS5621044A (en) | 1981-02-27 |
Family
ID=14198213
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9766079A Pending JPS5621044A (en) | 1979-07-31 | 1979-07-31 | Temperature modulation apparatus |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5621044A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61163971U (en) * | 1985-03-30 | 1986-10-11 | ||
JP2007155502A (en) * | 2005-12-05 | 2007-06-21 | Ricoh Co Ltd | Detector |
-
1979
- 1979-07-31 JP JP9766079A patent/JPS5621044A/en active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61163971U (en) * | 1985-03-30 | 1986-10-11 | ||
JPH0412450Y2 (en) * | 1985-03-30 | 1992-03-25 | ||
JP2007155502A (en) * | 2005-12-05 | 2007-06-21 | Ricoh Co Ltd | Detector |
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