JPS5617488Y2 - - Google Patents

Info

Publication number
JPS5617488Y2
JPS5617488Y2 JP1978058987U JP5898778U JPS5617488Y2 JP S5617488 Y2 JPS5617488 Y2 JP S5617488Y2 JP 1978058987 U JP1978058987 U JP 1978058987U JP 5898778 U JP5898778 U JP 5898778U JP S5617488 Y2 JPS5617488 Y2 JP S5617488Y2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1978058987U
Other languages
Japanese (ja)
Other versions
JPS54161343U (enExample
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1978058987U priority Critical patent/JPS5617488Y2/ja
Publication of JPS54161343U publication Critical patent/JPS54161343U/ja
Application granted granted Critical
Publication of JPS5617488Y2 publication Critical patent/JPS5617488Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP1978058987U 1978-04-28 1978-04-28 Expired JPS5617488Y2 (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1978058987U JPS5617488Y2 (enExample) 1978-04-28 1978-04-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1978058987U JPS5617488Y2 (enExample) 1978-04-28 1978-04-28

Publications (2)

Publication Number Publication Date
JPS54161343U JPS54161343U (enExample) 1979-11-12
JPS5617488Y2 true JPS5617488Y2 (enExample) 1981-04-23

Family

ID=28958290

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1978058987U Expired JPS5617488Y2 (enExample) 1978-04-28 1978-04-28

Country Status (1)

Country Link
JP (1) JPS5617488Y2 (enExample)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4999972A (enExample) * 1973-01-31 1974-09-20
JPS5514870B2 (enExample) * 1974-03-11 1980-04-19

Also Published As

Publication number Publication date
JPS54161343U (enExample) 1979-11-12

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