JPS54161343U - - Google Patents

Info

Publication number
JPS54161343U
JPS54161343U JP5898778U JP5898778U JPS54161343U JP S54161343 U JPS54161343 U JP S54161343U JP 5898778 U JP5898778 U JP 5898778U JP 5898778 U JP5898778 U JP 5898778U JP S54161343 U JPS54161343 U JP S54161343U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5898778U
Other languages
Japanese (ja)
Other versions
JPS5617488Y2 (enExample
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1978058987U priority Critical patent/JPS5617488Y2/ja
Publication of JPS54161343U publication Critical patent/JPS54161343U/ja
Application granted granted Critical
Publication of JPS5617488Y2 publication Critical patent/JPS5617488Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP1978058987U 1978-04-28 1978-04-28 Expired JPS5617488Y2 (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1978058987U JPS5617488Y2 (enExample) 1978-04-28 1978-04-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1978058987U JPS5617488Y2 (enExample) 1978-04-28 1978-04-28

Publications (2)

Publication Number Publication Date
JPS54161343U true JPS54161343U (enExample) 1979-11-12
JPS5617488Y2 JPS5617488Y2 (enExample) 1981-04-23

Family

ID=28958290

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1978058987U Expired JPS5617488Y2 (enExample) 1978-04-28 1978-04-28

Country Status (1)

Country Link
JP (1) JPS5617488Y2 (enExample)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4999972A (enExample) * 1973-01-31 1974-09-20
JPS50120969A (enExample) * 1974-03-11 1975-09-22

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4999972A (enExample) * 1973-01-31 1974-09-20
JPS50120969A (enExample) * 1974-03-11 1975-09-22

Also Published As

Publication number Publication date
JPS5617488Y2 (enExample) 1981-04-23

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