JPS4999972A - - Google Patents
Info
- Publication number
- JPS4999972A JPS4999972A JP1192173A JP1192173A JPS4999972A JP S4999972 A JPS4999972 A JP S4999972A JP 1192173 A JP1192173 A JP 1192173A JP 1192173 A JP1192173 A JP 1192173A JP S4999972 A JPS4999972 A JP S4999972A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1192173A JPS4999972A (enExample) | 1973-01-31 | 1973-01-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1192173A JPS4999972A (enExample) | 1973-01-31 | 1973-01-31 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS4999972A true JPS4999972A (enExample) | 1974-09-20 |
Family
ID=11791141
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1192173A Pending JPS4999972A (enExample) | 1973-01-31 | 1973-01-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS4999972A (enExample) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS54161343U (enExample) * | 1978-04-28 | 1979-11-12 | ||
| JPS6116365U (ja) * | 1984-06-28 | 1986-01-30 | 三菱電機株式会社 | 薄膜蒸着装置 |
-
1973
- 1973-01-31 JP JP1192173A patent/JPS4999972A/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS54161343U (enExample) * | 1978-04-28 | 1979-11-12 | ||
| JPS6116365U (ja) * | 1984-06-28 | 1986-01-30 | 三菱電機株式会社 | 薄膜蒸着装置 |