JPS56167030U - - Google Patents

Info

Publication number
JPS56167030U
JPS56167030U JP6426180U JP6426180U JPS56167030U JP S56167030 U JPS56167030 U JP S56167030U JP 6426180 U JP6426180 U JP 6426180U JP 6426180 U JP6426180 U JP 6426180U JP S56167030 U JPS56167030 U JP S56167030U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6426180U
Other versions
JPS6117549Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6426180U priority Critical patent/JPS6117549Y2/ja
Publication of JPS56167030U publication Critical patent/JPS56167030U/ja
Application granted granted Critical
Publication of JPS6117549Y2 publication Critical patent/JPS6117549Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Magnetic Record Carriers (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)
  • Physical Vapour Deposition (AREA)
JP6426180U 1980-05-10 1980-05-10 Expired JPS6117549Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6426180U JPS6117549Y2 (ja) 1980-05-10 1980-05-10

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6426180U JPS6117549Y2 (ja) 1980-05-10 1980-05-10

Publications (2)

Publication Number Publication Date
JPS56167030U true JPS56167030U (ja) 1981-12-10
JPS6117549Y2 JPS6117549Y2 (ja) 1986-05-29

Family

ID=29658459

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6426180U Expired JPS6117549Y2 (ja) 1980-05-10 1980-05-10

Country Status (1)

Country Link
JP (1) JPS6117549Y2 (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005320601A (ja) * 2004-05-11 2005-11-17 Cyg Gijutsu Kenkyusho Kk スパッタ装置
JP2006104525A (ja) * 2004-10-06 2006-04-20 Cyg Gijutsu Kenkyusho Kk スパッタ装置

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20030129325A1 (en) * 2001-03-22 2003-07-10 Noriaki Kandaka Film forming method,multilayer film reflector manufacturing method, and film forming device

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005320601A (ja) * 2004-05-11 2005-11-17 Cyg Gijutsu Kenkyusho Kk スパッタ装置
JP4617101B2 (ja) * 2004-05-11 2011-01-19 株式会社昭和真空 スパッタ装置
JP2006104525A (ja) * 2004-10-06 2006-04-20 Cyg Gijutsu Kenkyusho Kk スパッタ装置

Also Published As

Publication number Publication date
JPS6117549Y2 (ja) 1986-05-29

Similar Documents

Publication Publication Date Title
FR2474291B1 (ja)
FR2477318B3 (ja)
FR2474221B1 (ja)
FR2474086B1 (ja)
FR2473705B1 (ja)
FR2474076B1 (ja)
FR2474058B1 (ja)
FR2474843B1 (ja)
FR2479588B1 (ja)
FR2473547B1 (ja)
FR2473870B3 (ja)
FR2474113B2 (ja)
FR2474141B1 (ja)
FR2474164B3 (ja)
FR2474789B1 (ja)
FR2473579B1 (ja)
FR2474196B1 (ja)
FR2474710B2 (ja)
FR2473503B1 (ja)
FR2473874B1 (ja)
FR2457100B1 (ja)
FR2474638B1 (ja)
FR2474696B1 (ja)
FR2473689B1 (ja)
FR2473735B1 (ja)