JPS56155444U - - Google Patents
Info
- Publication number
- JPS56155444U JPS56155444U JP5411680U JP5411680U JPS56155444U JP S56155444 U JPS56155444 U JP S56155444U JP 5411680 U JP5411680 U JP 5411680U JP 5411680 U JP5411680 U JP 5411680U JP S56155444 U JPS56155444 U JP S56155444U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Coating Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5411680U JPS56155444U (pt) | 1980-04-21 | 1980-04-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5411680U JPS56155444U (pt) | 1980-04-21 | 1980-04-21 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS56155444U true JPS56155444U (pt) | 1981-11-20 |
Family
ID=29648895
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5411680U Pending JPS56155444U (pt) | 1980-04-21 | 1980-04-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS56155444U (pt) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6467916A (en) * | 1987-09-08 | 1989-03-14 | Tokyo Electron Ltd | Resist discharge nozzle |
| JP2016219791A (ja) * | 2015-04-08 | 2016-12-22 | ズス・マイクロテック・リソグラフィ・ゲゼルシャフト・ミット・ベシュレンクテル・ハフツングＳｕｓｓ ＭｉｃｒｏＴｅｃ Ｌｉｔｈｏｇｒａｐｈｙ ＧｍｂＨ | 基材にコーティングを施すための装置及び方法 |
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1980
- 1980-04-21 JP JP5411680U patent/JPS56155444U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6467916A (en) * | 1987-09-08 | 1989-03-14 | Tokyo Electron Ltd | Resist discharge nozzle |
| JP2016219791A (ja) * | 2015-04-08 | 2016-12-22 | ズス・マイクロテック・リソグラフィ・ゲゼルシャフト・ミット・ベシュレンクテル・ハフツングＳｕｓｓ ＭｉｃｒｏＴｅｃ Ｌｉｔｈｏｇｒａｐｈｙ ＧｍｂＨ | 基材にコーティングを施すための装置及び方法 |