JPS56146393A - Ultrasonic oscillation system - Google Patents

Abstract

PURPOSE:To ensure a stable working for an acoustic diaphragm with no generation of standing waves which are caused by a diffusion and radiation of ultrasonic waves within a bath, by forming the sound radiating surface of an ultrasonic oscillator into a prescribed convex surface and then forming the extended part in a body along the radiation curved surface at the outer circumference of the convex surface to form the diaphragm. CONSTITUTION:Both the convex curved surface part 4 and the extended part 6 are turned into a prescribed curved surface each for the bottom plate 5 of a process bath by a working method such as a press or the like, and the height H is set at a value larger than 1/4 wavelength in the liquid. Such plate 5 is formed in a plural number. The upper face 3A of the oscillator 3 joined to the lower face of the part 4 via a precision working. Then the electric power is supplied to the oscillator 3 from a generator and with a resonance frequency, and thus the energy converted into an ultrasonic wave is radiated toward the liquid surface from the plate 5. In this case, the part 4 forms a convex curved surface like a spherical surface or the like and then forms a convex curved surface radiator together with the part 6. As a result, the ultrasonic waves radiated into the liquid are diffused and radiated not only in the vertical direction but inside the bath. Thus an object to be processed and put into the process bath can be processed with no low-posture phenomenon caused by the depth of liquid.