JPS56145641A - Method of purifying electro-optical device - Google Patents

Method of purifying electro-optical device

Info

Publication number
JPS56145641A
JPS56145641A JP4935980A JP4935980A JPS56145641A JP S56145641 A JPS56145641 A JP S56145641A JP 4935980 A JP4935980 A JP 4935980A JP 4935980 A JP4935980 A JP 4935980A JP S56145641 A JPS56145641 A JP S56145641A
Authority
JP
Japan
Prior art keywords
diaphragm
purifying
purified
vacuum
electro
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4935980A
Other languages
Japanese (ja)
Inventor
Hiroyoshi Soejima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Priority to JP4935980A priority Critical patent/JPS56145641A/en
Publication of JPS56145641A publication Critical patent/JPS56145641A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)

Abstract

PURPOSE:To simply and fully purify parts without taking them out in the vacuum by purifying them in a vacuum mirror cavity by way of ion bombardment. CONSTITUTION:When a diaphragm 2 is purified, a switch 5 is switched to power supply E and ionized gas is induced around the upper part of the diaphragm 2 using a valve 8. In this case, the exhaust system of a mirror cavity 6 is kept actuated. Since the gas pressure around the diaphragm 2 increases considerably and the diaphragm 2 is set to the negative high potential, the outer surface of the diaphragm 2 is covered by glow discharge and the diaphragm 2 is ion-bombarded. The adhesive material on the diaphragm 2 is scattered by this ion bombardment and the surface of the diaphragm 2 is purified.
JP4935980A 1980-04-14 1980-04-14 Method of purifying electro-optical device Pending JPS56145641A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4935980A JPS56145641A (en) 1980-04-14 1980-04-14 Method of purifying electro-optical device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4935980A JPS56145641A (en) 1980-04-14 1980-04-14 Method of purifying electro-optical device

Publications (1)

Publication Number Publication Date
JPS56145641A true JPS56145641A (en) 1981-11-12

Family

ID=12828817

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4935980A Pending JPS56145641A (en) 1980-04-14 1980-04-14 Method of purifying electro-optical device

Country Status (1)

Country Link
JP (1) JPS56145641A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6543225B2 (en) 2001-07-20 2003-04-08 Scuderi Group Llc Split four stroke cycle internal combustion engine
US6722127B2 (en) 2001-07-20 2004-04-20 Carmelo J. Scuderi Split four stroke engine
US6952923B2 (en) 2003-06-20 2005-10-11 Branyon David P Split-cycle four-stroke engine
US6986329B2 (en) 2003-07-23 2006-01-17 Scuderi Salvatore C Split-cycle engine with dwell piston motion
JP2010212583A (en) * 2009-03-12 2010-09-24 Nuflare Technology Inc Cleaning method and drawing method of shaping aperture member

Cited By (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7017536B2 (en) 2001-07-20 2006-03-28 Scuderi Carmelo J Split four stroke engine
US6609371B2 (en) 2001-07-20 2003-08-26 Scuderi Group Llc Split four stroke engine
US6722127B2 (en) 2001-07-20 2004-04-20 Carmelo J. Scuderi Split four stroke engine
US6880502B2 (en) 2001-07-20 2005-04-19 Carmelo J. Scuderi Split four stroke engine
US7628126B2 (en) 2001-07-20 2009-12-08 Scuderi Group, Llc Split four stroke engine
US6543225B2 (en) 2001-07-20 2003-04-08 Scuderi Group Llc Split four stroke cycle internal combustion engine
US6952923B2 (en) 2003-06-20 2005-10-11 Branyon David P Split-cycle four-stroke engine
US7588001B2 (en) 2003-06-20 2009-09-15 Scuderi Group, Llc Split-cycle four-stroke engine
US7810459B2 (en) 2003-06-20 2010-10-12 Scuderi Group, Llc Split-cycle four-stroke engine
US7954461B2 (en) 2003-06-20 2011-06-07 Scuderi Group, Llc Split-cycle four-stroke engine
US8006656B2 (en) 2003-06-20 2011-08-30 Scuderi Group, Llc Split-cycle four-stroke engine
US6986329B2 (en) 2003-07-23 2006-01-17 Scuderi Salvatore C Split-cycle engine with dwell piston motion
US7121236B2 (en) 2003-07-23 2006-10-17 Scuderi Salvatore C Split-cycle engine with dwell piston motion
JP2010212583A (en) * 2009-03-12 2010-09-24 Nuflare Technology Inc Cleaning method and drawing method of shaping aperture member

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