JPS56143943A - Gas leakage inspecting device for cooling unit - Google Patents

Gas leakage inspecting device for cooling unit

Info

Publication number
JPS56143943A
JPS56143943A JP4833480A JP4833480A JPS56143943A JP S56143943 A JPS56143943 A JP S56143943A JP 4833480 A JP4833480 A JP 4833480A JP 4833480 A JP4833480 A JP 4833480A JP S56143943 A JPS56143943 A JP S56143943A
Authority
JP
Japan
Prior art keywords
pretest
exhaust
systems
regular
regular test
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4833480A
Other languages
Japanese (ja)
Other versions
JPS6236529B2 (en
Inventor
Fumio Ando
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP4833480A priority Critical patent/JPS56143943A/en
Publication of JPS56143943A publication Critical patent/JPS56143943A/en
Publication of JPS6236529B2 publication Critical patent/JPS6236529B2/ja
Granted legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01MTESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00Investigating fluid-tightness of structures
    • G01M3/02Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/04Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
    • G01M3/20Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01MTESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00Investigating fluid-tightness of structures
    • G01M3/02Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/04Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
    • G01M3/20Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
    • G01M3/202Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material using mass spectrometer detection systems

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Examining Or Testing Airtightness (AREA)

Abstract

PURPOSE:To improve inspection treatment capacity and prevent the decrease in working efficiency as far as possible by forming the device into the constitution in which a pretest for the purpose of rough leakage detection is carried out prior to a regular test. CONSTITUTION:The objects 16 to be examined and tightly closed with gaseous helium under pressure in refrigerant flow passages are housed in sealed chambers 14 by lowering bell jars 1-10 with pneumetic cylinders 15, and are thereby inspected. Rough exhaust systems 19, regular exhaust systems 21 and regular test exhaust systems 22 are separated respectively into two systems for 5 pieces each of the bell jars, and a pretest exhaust system 20 is common for 10 pieces of the bell jars. At such a time when gaseous helium detectors 34, 36 for regular test are out of order, the pretest exhaust system is shut off and the regular test exhaust systems are changed over to a vacuum pump for the pretest exhaust system and the exhaust gas thereof is conducted to a gaseous helium detector 38 for pretest, whereby said detectors are repaired under system working.
JP4833480A 1980-04-10 1980-04-10 Gas leakage inspecting device for cooling unit Granted JPS56143943A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4833480A JPS56143943A (en) 1980-04-10 1980-04-10 Gas leakage inspecting device for cooling unit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4833480A JPS56143943A (en) 1980-04-10 1980-04-10 Gas leakage inspecting device for cooling unit

Publications (2)

Publication Number Publication Date
JPS56143943A true JPS56143943A (en) 1981-11-10
JPS6236529B2 JPS6236529B2 (en) 1987-08-07

Family

ID=12800506

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4833480A Granted JPS56143943A (en) 1980-04-10 1980-04-10 Gas leakage inspecting device for cooling unit

Country Status (1)

Country Link
JP (1) JPS56143943A (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01129990A (en) * 1987-11-13 1989-05-23 Fujitsu Ltd Apparatus for plating gold for fine pattern

Also Published As

Publication number Publication date
JPS6236529B2 (en) 1987-08-07

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