JPS56143941A - Inspecting-gas sealing device for helium leak test - Google Patents

Inspecting-gas sealing device for helium leak test

Info

Publication number
JPS56143941A
JPS56143941A JP4820580A JP4820580A JPS56143941A JP S56143941 A JPS56143941 A JP S56143941A JP 4820580 A JP4820580 A JP 4820580A JP 4820580 A JP4820580 A JP 4820580A JP S56143941 A JPS56143941 A JP S56143941A
Authority
JP
Japan
Prior art keywords
gas
opened
valve
chamber
sealing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4820580A
Other languages
Japanese (ja)
Other versions
JPS6143652B2 (en
Inventor
Fumio Ando
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP4820580A priority Critical patent/JPS56143941A/en
Publication of JPS56143941A publication Critical patent/JPS56143941A/en
Publication of JPS6143652B2 publication Critical patent/JPS6143652B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00—Investigating fluid-tightness of structures
    • G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
    • G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
    • G01M3/202—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material using mass spectrometer detection systems

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Examining Or Testing Airtightness (AREA)

Abstract

PURPOSE:To maintain high-accuracy detection capacity and reduce the use amount of helium gas by tightly sealing the circumference of a refrigerant pipe of a cooling unit extending into the cavity part of a connecting member through the through- hole of a sealed chamber by means of sealing members. CONSTITUTION:An object to be examined 7 is installed on a stage 3 for the purpose of gas leak inspection. At this time, while the pipe part 36 extending from the nonclosed end of the refrigerant flow passage of the object 7 is being inserted into an insertion port part 21, the part 36 is penetrated serially through the 1st sealing member 28, an auxiliary pressing member 30 and the 2nd sealing member 29, so that it is put communicative with a gas feed-exhaust passage 25. Before or after this, a bell jar 1 is lowered to close a sealed chamber 5, thence a valve 15 is opened to evacuate the inside of the chamber 5 through a rough exhaust system 12 until the pressure drops down to the prescribed one. Thence, a valve 16 is opened to further evacuate the inside of the chamber 5 to a higher vacuum state through an exhaust system 14 for testing, after which a valve 18 is opened to conduct part of the exhaust gas to a helium gas detector 17, where the presence of the helium gas, that is, the presence of gas leakage is detected.
JP4820580A 1980-04-11 1980-04-11 Inspecting-gas sealing device for helium leak test Granted JPS56143941A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4820580A JPS56143941A (en) 1980-04-11 1980-04-11 Inspecting-gas sealing device for helium leak test

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4820580A JPS56143941A (en) 1980-04-11 1980-04-11 Inspecting-gas sealing device for helium leak test

Publications (2)

Publication Number Publication Date
JPS56143941A true JPS56143941A (en) 1981-11-10
JPS6143652B2 JPS6143652B2 (en) 1986-09-29

Family

ID=12796877

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4820580A Granted JPS56143941A (en) 1980-04-11 1980-04-11 Inspecting-gas sealing device for helium leak test

Country Status (1)

Country Link
JP (1) JPS56143941A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58225337A (en) * 1982-06-25 1983-12-27 Toshiba Corp Method and apparatus for testing leakage
CN107091716A (en) * 2017-04-13 2017-08-25 深圳市卓誉自动化科技有限公司 A kind of vacuum helium checking device and method for being used to detect battery sealing-performance
CN111868494A (en) * 2018-03-19 2020-10-30 伸和控制工业股份有限公司 Inspection device and inspection method for inspecting three-way valve device for leakage

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58225337A (en) * 1982-06-25 1983-12-27 Toshiba Corp Method and apparatus for testing leakage
CN107091716A (en) * 2017-04-13 2017-08-25 深圳市卓誉自动化科技有限公司 A kind of vacuum helium checking device and method for being used to detect battery sealing-performance
CN111868494A (en) * 2018-03-19 2020-10-30 伸和控制工业股份有限公司 Inspection device and inspection method for inspecting three-way valve device for leakage

Also Published As

Publication number Publication date
JPS6143652B2 (en) 1986-09-29

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