JPS56142435A - Device for inspecting gas leak in cooling unit - Google Patents

Device for inspecting gas leak in cooling unit

Info

Publication number
JPS56142435A
JPS56142435A JP4718680A JP4718680A JPS56142435A JP S56142435 A JPS56142435 A JP S56142435A JP 4718680 A JP4718680 A JP 4718680A JP 4718680 A JP4718680 A JP 4718680A JP S56142435 A JPS56142435 A JP S56142435A
Authority
JP
Japan
Prior art keywords
closed chamber
valve
vacuum pump
pressure
detector
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4718680A
Other languages
Japanese (ja)
Inventor
Hiroyuki Takenaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP4718680A priority Critical patent/JPS56142435A/en
Publication of JPS56142435A publication Critical patent/JPS56142435A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00—Investigating fluid-tightness of structures
    • G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
    • G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
    • G01M3/202—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material using mass spectrometer detection systems

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Examining Or Testing Airtightness (AREA)

Abstract

PURPOSE:To reduce equipment costs by carrying out pretest and main test with the same exhausting system and the same detector. CONSTITUTION:An inspected object 7 filled with helium gas in its refrigerant flow passage is mounted on a mounting base 3, while a bell jar 1 is lowered to contain the object in a closed chamber 5. The closed chamber 5 is communicated with an exhausting system 11 connected to a vacuum pump 10 via a main valve 12, and also communicated with a helium gas detector 13 via a flow adjusting valve 14 and an opening and closing valve 15. To the detector 13 is connected a vacuum pump in its inside from the exhausting system 11. The vacuum pump 10 is run continuously during tests. The flow adjusting valve 14 is opened to a small flow quantity on the first stage when the pressure of the closed chamber 5 has dropped to a specified value and a pretest, rough leak detection, is carried out. Then on the second stage when the pressure of the closed chamber 5 has dropped lower than said pressure, the valve is opened to a large flow quantity and a main test, a fine leak detection, is carried out.
JP4718680A 1980-04-09 1980-04-09 Device for inspecting gas leak in cooling unit Pending JPS56142435A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4718680A JPS56142435A (en) 1980-04-09 1980-04-09 Device for inspecting gas leak in cooling unit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4718680A JPS56142435A (en) 1980-04-09 1980-04-09 Device for inspecting gas leak in cooling unit

Publications (1)

Publication Number Publication Date
JPS56142435A true JPS56142435A (en) 1981-11-06

Family

ID=12768062

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4718680A Pending JPS56142435A (en) 1980-04-09 1980-04-09 Device for inspecting gas leak in cooling unit

Country Status (1)

Country Link
JP (1) JPS56142435A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2599409C1 (en) * 2015-06-15 2016-10-10 Акционерное Общество "Научно-Исследовательский Институт "Гермес" Method of controlling tightness of article housing elements
CN110571118A (en) * 2018-06-06 2019-12-13 北京北方华创微电子装备有限公司 Flow threshold determination method, control device and semiconductor processing equipment

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2599409C1 (en) * 2015-06-15 2016-10-10 Акционерное Общество "Научно-Исследовательский Институт "Гермес" Method of controlling tightness of article housing elements
CN110571118A (en) * 2018-06-06 2019-12-13 北京北方华创微电子装备有限公司 Flow threshold determination method, control device and semiconductor processing equipment
CN110571118B (en) * 2018-06-06 2022-03-22 北京北方华创微电子装备有限公司 Flow threshold determination method, control device and semiconductor processing equipment

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