JPS56137151A - Multi-frequency type apparatus for and method of testing eddy current - Google Patents

Multi-frequency type apparatus for and method of testing eddy current

Info

Publication number
JPS56137151A
JPS56137151A JP2825881A JP2825881A JPS56137151A JP S56137151 A JPS56137151 A JP S56137151A JP 2825881 A JP2825881 A JP 2825881A JP 2825881 A JP2825881 A JP 2825881A JP S56137151 A JPS56137151 A JP S56137151A
Authority
JP
Japan
Prior art keywords
eddy current
type apparatus
frequency type
testing
testing eddy
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2825881A
Other languages
English (en)
Inventor
Jiei Deibuisu Toomasu
Bii Peerii Chiyaarusu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Electric Power Research Institute Inc
Original Assignee
Electric Power Research Institute Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Electric Power Research Institute Inc filed Critical Electric Power Research Institute Inc
Publication of JPS56137151A publication Critical patent/JPS56137151A/ja
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/72—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating magnetic variables
    • G01N27/82—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating magnetic variables for investigating the presence of flaws
    • G01N27/90—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating magnetic variables for investigating the presence of flaws using eddy currents
    • G01N27/9046—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating magnetic variables for investigating the presence of flaws using eddy currents by analysing electrical signals
    • G01N27/9053—Compensating for probe to workpiece spacing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/72—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating magnetic variables
    • G01N27/82—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating magnetic variables for investigating the presence of flaws
    • G01N27/90—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating magnetic variables for investigating the presence of flaws using eddy currents
    • G01N27/9046—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating magnetic variables for investigating the presence of flaws using eddy currents by analysing electrical signals

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Magnetic Means (AREA)
JP2825881A 1980-02-29 1981-02-27 Multi-frequency type apparatus for and method of testing eddy current Pending JPS56137151A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US06/125,895 US4467281A (en) 1980-02-29 1980-02-29 Multi frequency eddy current test apparatus with intermediate frequency processing

Publications (1)

Publication Number Publication Date
JPS56137151A true JPS56137151A (en) 1981-10-26

Family

ID=22421957

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2825881A Pending JPS56137151A (en) 1980-02-29 1981-02-27 Multi-frequency type apparatus for and method of testing eddy current

Country Status (3)

Country Link
US (1) US4467281A (ja)
EP (1) EP0035391A3 (ja)
JP (1) JPS56137151A (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59108955A (ja) * 1982-12-13 1984-06-23 Nippon Steel Corp マルチプロ−ブコイルマルチ周波数渦流探傷装置
JPS59166857A (ja) * 1983-03-11 1984-09-20 Nippon Steel Corp マルチプロ−ブ、マルチ周波数渦流探傷装置の信号処理回路

Families Citing this family (48)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
ZA807387B (en) * 1979-12-08 1981-11-25 Metal Box Co Ltd Containers
BE892241A (fr) * 1982-02-23 1982-06-16 Dev Et D Industrialisation Des Circuit de calcul rapide de la transformee de fourier discrete d'un signal, destine notamment a un appareil de controle par courants de foucault.
FR2540630B1 (fr) * 1983-02-08 1985-08-09 Commissariat Energie Atomique Sonde multibobines a courants de foucault munie d'un dispositif d'equilibrage des bobines
US4629985A (en) * 1984-04-11 1986-12-16 Pa Incorporated Method and apparatus for measuring defects in tubular members
US4631533A (en) * 1984-06-15 1986-12-23 Westinghouse Electric Corp. Display of eddy current detector data
US4634975A (en) * 1984-09-17 1987-01-06 Progressive Dynamics, Inc. Method and apparatus for producing electromagnetic surveillance fields
FR2570501B1 (fr) * 1984-09-20 1987-12-18 Siderurgie Fse Inst Rech Procede de detection de defauts de surface par courants de foucault et dispositif mettant en oeuvre ce procede
US4860756A (en) * 1985-07-11 1989-08-29 The Johns Hopkins University Electromagnetic bone healing sensor using a multi-coil sensor array
US4855677A (en) * 1988-03-11 1989-08-08 Westinghouse Electric Corp. Multiple coil eddy current probe and method of flaw detection
US4924182A (en) * 1989-01-09 1990-05-08 The United States Of America As Represented By The Secretary Of The Navy Eddy current method to measure distance between scanned surface and a subsurface defect
US4922201A (en) * 1989-01-09 1990-05-01 The United States Of America As Represented By The Secretary Of The Navy Eddy current method for measuring electrical resistivity and device for providing accurate phase detection
USH879H (en) * 1989-06-30 1991-01-01 The United States Of America As Represented By The Secretary Of The Navy Method and device for inspecting circumferentially conducting materials
US5017869A (en) * 1989-12-14 1991-05-21 General Electric Company Swept frequency eddy current system for measuring coating thickness
US5047719A (en) * 1990-05-25 1991-09-10 The Failure Group, Inc. Flexible coil assembly for reflectance-mode nondestructive eddy-current examination
US5237271A (en) * 1991-05-06 1993-08-17 General Electric Company Apparatus and method for non-destructive testing using multi-frequency eddy currents
FR2735925B1 (fr) * 1995-06-20 1997-09-12 Intercontrole Sa Dispositif de demodulation simultanee d'un signal multifrequentiel, notamment pour une mesure par courants de foucault
KR0167727B1 (ko) * 1996-05-07 1999-02-01 김광호 핸드폰의 마이크/헤드폰 잭을 이용한 무선 데이타 통신 시스템
DE29608664U1 (de) * 1996-05-13 1997-09-18 Debnar Beinssen, Angelika, Dipl.-Ing., 20149 Hamburg Vorrichtung zum Werkstoffprüfen einer metallischen Wand
US5963030A (en) * 1998-03-30 1999-10-05 Union Oil Company Of California Pipe inspection apparatus and process
US6337218B1 (en) 1999-05-28 2002-01-08 International Business Machines Corporation Method to test devices on high performance ULSI wafers
US6479989B2 (en) 1999-10-13 2002-11-12 Albert Rudolph Taylor Eddy current probe with an adjustable bisected sensing end
US6346807B1 (en) * 1999-10-22 2002-02-12 Bently Nevada Corporation Digital eddy current proximity system: apparatus and method
US7374477B2 (en) 2002-02-06 2008-05-20 Applied Materials, Inc. Polishing pads useful for endpoint detection in chemical mechanical polishing
US6924641B1 (en) * 2000-05-19 2005-08-02 Applied Materials, Inc. Method and apparatus for monitoring a metal layer during chemical mechanical polishing
US6878038B2 (en) * 2000-07-10 2005-04-12 Applied Materials Inc. Combined eddy current sensing and optical monitoring for chemical mechanical polishing
US6602724B2 (en) 2000-07-27 2003-08-05 Applied Materials, Inc. Chemical mechanical polishing of a metal layer with polishing rate monitoring
US6608495B2 (en) 2001-03-19 2003-08-19 Applied Materials, Inc. Eddy-optic sensor for object inspection
US6966816B2 (en) * 2001-05-02 2005-11-22 Applied Materials, Inc. Integrated endpoint detection system with optical and eddy current monitoring
US6803757B2 (en) 2001-10-02 2004-10-12 Bentley Nevada, Llc Multi-coil eddy current proximity probe system
US6811466B1 (en) * 2001-12-28 2004-11-02 Applied Materials, Inc. System and method for in-line metal profile measurement
GB2389909A (en) * 2002-06-22 2003-12-24 Hocking Ndt Ltd Inductively coupled eddy current probe
US7016795B2 (en) * 2003-02-04 2006-03-21 Applied Materials Inc. Signal improvement in eddy current sensing
US6945845B2 (en) * 2003-03-04 2005-09-20 Applied Materials, Inc. Chemical mechanical polishing apparatus with non-conductive elements
KR100505929B1 (ko) * 2003-03-31 2005-08-04 삼성광주전자 주식회사 압축기 및 압축기의 배관연결방법
DE10324990B3 (de) * 2003-06-03 2004-11-04 Visit Video-Stroboskop Innovations-Technik Gmbh & Co. Kg Vorrichtung zur Untersuchung eines flüssigen oder gasförmigen Mediums
US7112960B2 (en) * 2003-07-31 2006-09-26 Applied Materials, Inc. Eddy current system for in-situ profile measurement
US7025658B2 (en) * 2003-08-18 2006-04-11 Applied Materials, Inc. Platen and head rotation rates for monitoring chemical mechanical polishing
US7113873B2 (en) * 2003-11-26 2006-09-26 General Electric Company Method and system for using eddy current transducers in pressure measurements
US6873149B1 (en) 2003-11-26 2005-03-29 General Electric Company Method and system for eddy current proximity system noise reduction
US7068041B2 (en) * 2003-11-26 2006-06-27 General Electric Company Method and system for multi-frequency inductive ratio measurement
EP1952135A4 (en) * 2005-11-03 2011-12-14 Coastal Res Corp CONVIVIAL FOUCAULT CURRENT NETWORK
US8337278B2 (en) * 2007-09-24 2012-12-25 Applied Materials, Inc. Wafer edge characterization by successive radius measurements
IL196343A0 (en) * 2008-01-03 2009-09-22 Soreq Nuclear Res Ct Israel At Bone fracture detection
JP5611214B2 (ja) 2008-10-16 2014-10-22 アプライド マテリアルズ インコーポレイテッドＡｐｐｌｉｅｄ Ｍａｔｅｒｉａｌｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ 渦電流利得の補償
JP5615831B2 (ja) * 2008-11-14 2014-10-29 アプライド マテリアルズ インコーポレイテッドＡｐｐｌｉｅｄ Ｍａｔｅｒｉａｌｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ 縁部分解能強化渦電流センサ
CN101603947B (zh) * 2009-07-08 2012-03-28 中国人民解放军国防科学技术大学 集成涡流无损检测系统
CN106442703B (zh) * 2016-09-18 2019-06-04 中国医学科学院生物医学工程研究所 一种降低功耗的门控交变电磁激励的磁声成像装置及方法
WO2018080764A1 (en) 2016-10-28 2018-05-03 Applied Materials, Inc. Core configuration with alternating posts for in-situ electromagnetic induction monitoring system

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2894203A (en) * 1957-04-11 1959-07-07 Robert W Cory Multiple frequency eddy current testing apparatus
US3626279A (en) * 1970-05-15 1971-12-07 Charles D Walden Metal detector utilizing radio receiver and harmonic signal generator
US4006407A (en) * 1975-03-10 1977-02-01 Magnaflux Corporation Non-destructive testing systems having automatic balance and sample and hold operational modes
FR2324003A1 (fr) * 1975-09-09 1977-04-08 Commissariat Energie Atomique Procede de controle non destructif par courants de foucault et dispositif correspondant, utilisant une excitation multifrequence et permettant l'elimination de certains parametres
US4107598A (en) * 1976-02-02 1978-08-15 Texaco Inc. Electromagnetic wave logging system for determining resistivity and dielectric constant of earth formations
US4170755A (en) * 1977-08-24 1979-10-09 Magnetic Analysis Corporation FM transmitter and receiver for use with non-destructive testing apparatus including a moveable head
DE2739873A1 (de) * 1977-09-05 1979-03-08 Fraunhofer Ges Forschung Verfahren zur zerstoerungsfreien werkstoffpruefung nach dem wirbelstromverfahren
US4207520A (en) * 1978-04-06 1980-06-10 The United States Of America As Represented By The Secretary Of The Air Force Multiple frequency digital eddy current inspection system

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59108955A (ja) * 1982-12-13 1984-06-23 Nippon Steel Corp マルチプロ−ブコイルマルチ周波数渦流探傷装置
JPH0441300B2 (ja) * 1982-12-13 1992-07-07 Nippon Steel Corp
JPS59166857A (ja) * 1983-03-11 1984-09-20 Nippon Steel Corp マルチプロ−ブ、マルチ周波数渦流探傷装置の信号処理回路
JPH0441302B2 (ja) * 1983-03-11 1992-07-07 Nippon Steel Corp

Also Published As

Publication number Publication date
US4467281A (en) 1984-08-21
EP0035391A2 (en) 1981-09-09
EP0035391A3 (en) 1982-03-31

Similar Documents

Publication Publication Date Title
JPS56137151A (en) Multi-frequency type apparatus for and method of testing eddy current
JPS56125663A (en) Sample testing apparatus and method
GB2070772B (en) Method and apparatus for detection of dew point
GB2127559B (en) Method and apparatus for nonsteady state testing of permeability
DE3167370D1 (en) Method and apparatus for fault detection
JPS57124269A (en) Range measuring method and apparatus
DE3266126D1 (en) Method and apparatus for contactless electrical testing
JPS56150331A (en) Method of and apparatus for determining nature of unknown substance
GB2086574B (en) Method and apparatus for analysis of ionic species
JPS57113157A (en) Method and apparatus for inspecting function of indicator
JPS5537991A (en) Method of and apparatus for detecting paramagnetic additives
GB2070300B (en) Electrical testing apparatus and methods
EP0176620A3 (en) Method and apparatus for detecting movable object method and apparatus for detecting movable object
GB2138145B (en) Method and apparatus for continuously measuring distance utilizing eddy currents
JPS56154655A (en) Method of and apparatus for forming electric combination with analysing slide
JPS5754862A (en) Method of and apparatus for detecting and quantization
IL65176A0 (en) Material testing method and apparatus
IL64556A0 (en) Method and apparatus for batterymolding
JPS56150302A (en) Contactless method of and apparatus for measuring dimensions
DE3367124D1 (en) Test apparatus and method
DE2963690D1 (en) Method and apparatus for testing enclosed electromagnetic relays
JPS57129500A (en) Method of and apparatus for detecting voice separations
DE3066364D1 (en) Method and apparatus for eddy current testing of metallic products and application of the method and apparatus
JPS5724865A (en) Method of and apparatus for measuring resistance
JPS5753610A (en) Method of and apparatus for measuring surface shape