JPS56124243A - Semiconductor integrated circuit device - Google Patents

Semiconductor integrated circuit device

Info

Publication number
JPS56124243A
JPS56124243A JP2430881A JP2430881A JPS56124243A JP S56124243 A JPS56124243 A JP S56124243A JP 2430881 A JP2430881 A JP 2430881A JP 2430881 A JP2430881 A JP 2430881A JP S56124243 A JPS56124243 A JP S56124243A
Authority
JP
Japan
Prior art keywords
layer
motion
type
scr
check
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2430881A
Other languages
Japanese (ja)
Inventor
Fumihito Inoue
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP2430881A priority Critical patent/JPS56124243A/en
Publication of JPS56124243A publication Critical patent/JPS56124243A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/76—Making of isolation regions between components
    • H01L21/761—PN junctions

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Element Separation (AREA)
  • Bipolar Integrated Circuits (AREA)

Abstract

PURPOSE:To check SCR motion of a parasitic NPN element and prevent an IC from erroneous operation, in an N epitaxial layer separated from a P layer, by providing an annular N<+> layer surrounding the P layer and a P separating layer. CONSTITUTION:A P type Si substrate 1 is provided with an N<+> flush layer 2, an N epitaxial layer 3 is laminated and separated by a P layer 4. The N layer 3 is provided with a P type resistance element 5, a P base 6, an N emitter 7 and an N<+> connection layer 8. Further, an annular N<+> layer 9 is provided between the P type resistance element and the separating layer 4 and connected to a flush layer. Surface is covered by an SiO2 10 and provided with electrodes 11 and 12, and the N layer 13 is laminated onto reverse of the substrate 1 and connected to a metallic tab 14. A distance between the P layers 5 and 6, which are to become a supply source of hole, and the P type separation layer 4 is made larger than the dispersion distance. For this reason, even if joining between the P base 6 and the N collector 3 were to be transitionally biased backwardly to allow hole to flow to the N layer 3, it is rejoined at the N<+> layer 9, and therefore, it is possible to check SCR motion of a parastic NPN element and prevent an erroneous motion.
JP2430881A 1981-02-23 1981-02-23 Semiconductor integrated circuit device Pending JPS56124243A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2430881A JPS56124243A (en) 1981-02-23 1981-02-23 Semiconductor integrated circuit device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2430881A JPS56124243A (en) 1981-02-23 1981-02-23 Semiconductor integrated circuit device

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP4972773A Division JPS501686A (en) 1973-05-07 1973-05-07

Publications (1)

Publication Number Publication Date
JPS56124243A true JPS56124243A (en) 1981-09-29

Family

ID=12134542

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2430881A Pending JPS56124243A (en) 1981-02-23 1981-02-23 Semiconductor integrated circuit device

Country Status (1)

Country Link
JP (1) JPS56124243A (en)

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