JPS56118251A - Blanking device in electro-optical system - Google Patents

Blanking device in electro-optical system

Info

Publication number
JPS56118251A
JPS56118251A JP2063880A JP2063880A JPS56118251A JP S56118251 A JPS56118251 A JP S56118251A JP 2063880 A JP2063880 A JP 2063880A JP 2063880 A JP2063880 A JP 2063880A JP S56118251 A JPS56118251 A JP S56118251A
Authority
JP
Japan
Prior art keywords
blanking
mirror body
guard
board
wire
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2063880A
Other languages
Japanese (ja)
Other versions
JPS608581B2 (en
Inventor
Soichiro Hayashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP55020638A priority Critical patent/JPS608581B2/en
Publication of JPS56118251A publication Critical patent/JPS56118251A/en
Publication of JPS608581B2 publication Critical patent/JPS608581B2/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Beam Exposure (AREA)

Abstract

PURPOSE:To obtain an electron beam describing device which can draw a figure with high accuracy, by providing a shield guard on a blanking board thereby blocking the current flowing through a mirror body when the blanking voltage is changing. CONSTITUTION:A shield guard 19 is located between a mirror body 9 and a blanking board 4 and insulated through an insulator 11 from the blanking board 4, while connected through a guard wire 20 to the ground side of a blanking switch 15 to maintain the same potential with the mirror body 9. Consequently when the blanking switch 15 is switched from open to closed state to discharge the positive charge at the left side of the blanking board 4, the discharge current I2 of the stray capacitance C1' will not flow through the mirror body but through the guard wire 20, thereby it doesn't influence on the electron wire. Consequently good unblanking operation is performed resulting in a clear figure at the starting section with high accuracy.
JP55020638A 1980-02-22 1980-02-22 Blanking device in electron optical system Expired JPS608581B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP55020638A JPS608581B2 (en) 1980-02-22 1980-02-22 Blanking device in electron optical system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP55020638A JPS608581B2 (en) 1980-02-22 1980-02-22 Blanking device in electron optical system

Publications (2)

Publication Number Publication Date
JPS56118251A true JPS56118251A (en) 1981-09-17
JPS608581B2 JPS608581B2 (en) 1985-03-04

Family

ID=12032760

Family Applications (1)

Application Number Title Priority Date Filing Date
JP55020638A Expired JPS608581B2 (en) 1980-02-22 1980-02-22 Blanking device in electron optical system

Country Status (1)

Country Link
JP (1) JPS608581B2 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63146334A (en) * 1986-12-09 1988-06-18 Jeol Ltd Camera unit for electron microscope fitted with electron beam deflecting device
JP2011165667A (en) * 2010-02-12 2011-08-25 Carl Zeiss Nts Gmbh Particle beam system
JP2016054291A (en) * 2014-09-03 2016-04-14 株式会社ニューフレアテクノロジー Blanking device for multiple charged particle beam, multiple charged particle beam drawing device, and defective beam interception method of multiple charged particle beam

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63146334A (en) * 1986-12-09 1988-06-18 Jeol Ltd Camera unit for electron microscope fitted with electron beam deflecting device
JP2011165667A (en) * 2010-02-12 2011-08-25 Carl Zeiss Nts Gmbh Particle beam system
EP2360712A3 (en) * 2010-02-12 2017-01-04 Carl Zeiss NTS GmbH Particle beam system
JP2016054291A (en) * 2014-09-03 2016-04-14 株式会社ニューフレアテクノロジー Blanking device for multiple charged particle beam, multiple charged particle beam drawing device, and defective beam interception method of multiple charged particle beam

Also Published As

Publication number Publication date
JPS608581B2 (en) 1985-03-04

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