JPS56116874A - Boat for evaporation - Google Patents

Boat for evaporation

Info

Publication number
JPS56116874A
JPS56116874A JP1960380A JP1960380A JPS56116874A JP S56116874 A JPS56116874 A JP S56116874A JP 1960380 A JP1960380 A JP 1960380A JP 1960380 A JP1960380 A JP 1960380A JP S56116874 A JPS56116874 A JP S56116874A
Authority
JP
Japan
Prior art keywords
boat
evaporating
top lid
main body
substance
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1960380A
Other languages
Japanese (ja)
Inventor
Akira Sawada
Niro Motoki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Citizen Watch Co Ltd
Original Assignee
Citizen Watch Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Citizen Watch Co Ltd filed Critical Citizen Watch Co Ltd
Priority to JP1960380A priority Critical patent/JPS56116874A/en
Publication of JPS56116874A publication Critical patent/JPS56116874A/en
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/243—Crucibles for source material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/26—Vacuum evaporation by resistance or inductive heating of the source

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

PURPOSE:To equalize a thickness and quality of an evaporation coating, in the evaporating boat formed by a boat main body, an intermediate plate and a top lid, by thickening a thickness of the top lid thicker than that of the boat main body. CONSTITUTION:The evaporating boat for subjecting a sublimable substance to the evaporation is formed from the boat main body 1, the intermediate plate 3 and the top lid 2. To the top lid 2 and the intermediate plate 3, openings 2a and 3a which are not coincided to an upper and a lower directions are formed and, in a recessed part of the main body 1, an evaporating substance 4 is received. In this case, by adjusting the thickness of the top lid 2 to 1.5-3 times that of the boat main body 1, in evaporating said substance 4 by passing current to the boat, because electroconductivity of the top lid 2 becomes well and temp. rise of said top lid 2 itself becomes higher, said evaporating substance is not coagulated at the opening part 2a and a constant amount of the evaporating substance is always evaporated from said opening part 2a because a size of said opening part 2a does not become smaller. Therefore, a constant evaporating operation is always carried out stably.
JP1960380A 1980-02-19 1980-02-19 Boat for evaporation Pending JPS56116874A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1960380A JPS56116874A (en) 1980-02-19 1980-02-19 Boat for evaporation

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1960380A JPS56116874A (en) 1980-02-19 1980-02-19 Boat for evaporation

Publications (1)

Publication Number Publication Date
JPS56116874A true JPS56116874A (en) 1981-09-12

Family

ID=12003775

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1960380A Pending JPS56116874A (en) 1980-02-19 1980-02-19 Boat for evaporation

Country Status (1)

Country Link
JP (1) JPS56116874A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006037189A (en) * 2004-07-29 2006-02-09 Kyocera Corp Boat for vapor deposition
KR100590235B1 (en) * 2002-09-17 2006-06-15 삼성에스디아이 주식회사 Evaporation source

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100590235B1 (en) * 2002-09-17 2006-06-15 삼성에스디아이 주식회사 Evaporation source
JP2006037189A (en) * 2004-07-29 2006-02-09 Kyocera Corp Boat for vapor deposition
JP4502738B2 (en) * 2004-07-29 2010-07-14 京セラ株式会社 Deposition boat

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