JPS56111430A - Detector for fine vibration - Google Patents

Detector for fine vibration

Info

Publication number
JPS56111430A
JPS56111430A JP1432980A JP1432980A JPS56111430A JP S56111430 A JPS56111430 A JP S56111430A JP 1432980 A JP1432980 A JP 1432980A JP 1432980 A JP1432980 A JP 1432980A JP S56111430 A JPS56111430 A JP S56111430A
Authority
JP
Japan
Prior art keywords
photodetector
shift
signal
adjustment
focus position
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1432980A
Other languages
Japanese (ja)
Inventor
Seiichi Ogoshi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP1432980A priority Critical patent/JPS56111430A/en
Publication of JPS56111430A publication Critical patent/JPS56111430A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
    • G01H9/00—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by using radiation-sensitive means, e.g. optical means

Abstract

PURPOSE:To make it possible to detect fine vibration over a wide range with high sensitivity by making a focus adjustment by detecting the shift of the focus position of a photodetector from a body to be detected, and by correcting the adjustment control signal on the basis of the response characteristics of an adjusting mechanism. CONSTITUTION:Photodetector 2 is provided with position control circuit 10 and correcting circuit 11. Photodetector 8 has the photodetection area divided into two in the direction of a shift in optical axis. In this constitution, photodetector 8, once irradiated with light from light source 4, outputs the electric signal that corresponds to a distance shift of the focus position of the irradiated light from its detection surface. This output is supplied to amplifier 9 to find the difference between photodetection areas and its difference value is fed back via control circuit 10 as the driving signal of actuator mechanism 3 to make an adjustment so that the position relation of the shift of the focus position of detector 2 from the detection surface will be kept constant. In addition, the driving signal has dynamic characteristic components of mechanism 3 removed by correcting circuit 11 to obtain only vibration components, which are outputted as a fine vibration signal. Consequently, the sensitivity is improved and the band of response frequencies can also be widened.
JP1432980A 1980-02-08 1980-02-08 Detector for fine vibration Pending JPS56111430A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1432980A JPS56111430A (en) 1980-02-08 1980-02-08 Detector for fine vibration

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1432980A JPS56111430A (en) 1980-02-08 1980-02-08 Detector for fine vibration

Publications (1)

Publication Number Publication Date
JPS56111430A true JPS56111430A (en) 1981-09-03

Family

ID=11858022

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1432980A Pending JPS56111430A (en) 1980-02-08 1980-02-08 Detector for fine vibration

Country Status (1)

Country Link
JP (1) JPS56111430A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4955238A (en) * 1986-07-12 1990-09-11 Stc Plc Optical sensor
JP2013047674A (en) * 2011-07-28 2013-03-07 Kobe Steel Ltd Vibration measurement apparatus and vibration measurement method
RU2494356C2 (en) * 2011-03-29 2013-09-27 Государственный научно-исследовательский испытательный институт проблем технической защиты информации Федеральной службы по техническому и экспортному контролю Remote vibration sensor

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS529393A (en) * 1975-07-11 1977-01-24 Hitachi Ltd Display panel mounting unit
JPS529392A (en) * 1975-07-11 1977-01-24 Hitachi Ltd Driving method of display panel

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS529393A (en) * 1975-07-11 1977-01-24 Hitachi Ltd Display panel mounting unit
JPS529392A (en) * 1975-07-11 1977-01-24 Hitachi Ltd Driving method of display panel

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4955238A (en) * 1986-07-12 1990-09-11 Stc Plc Optical sensor
RU2494356C2 (en) * 2011-03-29 2013-09-27 Государственный научно-исследовательский испытательный институт проблем технической защиты информации Федеральной службы по техническому и экспортному контролю Remote vibration sensor
JP2013047674A (en) * 2011-07-28 2013-03-07 Kobe Steel Ltd Vibration measurement apparatus and vibration measurement method

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