JPS56111237A - Testing apparatus for semiconductor device - Google Patents

Testing apparatus for semiconductor device

Info

Publication number
JPS56111237A
JPS56111237A JP1362480A JP1362480A JPS56111237A JP S56111237 A JPS56111237 A JP S56111237A JP 1362480 A JP1362480 A JP 1362480A JP 1362480 A JP1362480 A JP 1362480A JP S56111237 A JPS56111237 A JP S56111237A
Authority
JP
Japan
Prior art keywords
prober
contact
semiconductor device
testing apparatus
spherical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1362480A
Other languages
English (en)
Inventor
Sakatoshi Okubo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP1362480A priority Critical patent/JPS56111237A/ja
Publication of JPS56111237A publication Critical patent/JPS56111237A/ja
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06733—Geometry aspects
    • G01R1/06738—Geometry aspects related to tip portion
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/07342—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card the body of the probe being at an angle other than perpendicular to test object, e.g. probe card

Landscapes

  • Physics & Mathematics (AREA)
  • Geometry (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Leads Or Probes (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP1362480A 1980-02-08 1980-02-08 Testing apparatus for semiconductor device Pending JPS56111237A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1362480A JPS56111237A (en) 1980-02-08 1980-02-08 Testing apparatus for semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1362480A JPS56111237A (en) 1980-02-08 1980-02-08 Testing apparatus for semiconductor device

Publications (1)

Publication Number Publication Date
JPS56111237A true JPS56111237A (en) 1981-09-02

Family

ID=11838381

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1362480A Pending JPS56111237A (en) 1980-02-08 1980-02-08 Testing apparatus for semiconductor device

Country Status (1)

Country Link
JP (1) JPS56111237A (ja)

Similar Documents

Publication Publication Date Title
JPS56111237A (en) Testing apparatus for semiconductor device
GB960199A (en) Improvements in and relating to blasting when using water tamping
ATE68056T1 (de) Vorrichtung zum elektrischen kontaktieren in einem impuls oder schockwellen erzeugenden apparat.
JPS56160639A (en) Testing method for solderability
JPS5320172A (en) Wind force fractioning device
DE889321C (de) Elektrische Taschenlampe
JPS5483774A (en) Manufacture of semiconductor device
JPS51120779A (en) Asoustic probe
JPS51132086A (en) Specific characteristics variation testing device
JPS527768A (en) Device to detect specific gravity and surface of liquid
JPS559182A (en) Printed base measuring device
JPS53147571A (en) Electrode holder of liquid level controller
JPS522470A (en) Circuit gauge
JPS5312294A (en) Supporting structure of piezoelectric vibrator
JPS53127268A (en) Size selection method
JPS6454585A (en) Object quantity detecting device
JPS547384A (en) Detecting method of partial discharge position
JPS5633849A (en) Probe device
JPS5248375A (en) Electricity sensing device
JPS5225659A (en) Device for measurement and inspection
JPS5220095A (en) Coin inspection unit
JPS5399716A (en) Clamp circuit
JPS51129275A (en) Number distinction device
JPS5612517A (en) Piezoelectric vibrator sensor
JPS53131080A (en) Vibrator pickup device