JPS56110005A - Manufacture of optical filter - Google Patents

Manufacture of optical filter

Info

Publication number
JPS56110005A
JPS56110005A JP1219180A JP1219180A JPS56110005A JP S56110005 A JPS56110005 A JP S56110005A JP 1219180 A JP1219180 A JP 1219180A JP 1219180 A JP1219180 A JP 1219180A JP S56110005 A JPS56110005 A JP S56110005A
Authority
JP
Japan
Prior art keywords
filter
defects
manufacture
optical
recorded
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1219180A
Other languages
Japanese (ja)
Inventor
Yoshihisa Morioka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP1219180A priority Critical patent/JPS56110005A/en
Publication of JPS56110005A publication Critical patent/JPS56110005A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects
    • G01N21/95623—Inspecting patterns on the surface of objects using a spatial filtering method

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

PURPOSE:To manufacture the optical filter simply and accurately by using various optical filters according to the kinds of defects, detecting fine changes in defects by means of electric signals and thereby manufacturing the filter having the least common multiple properties. CONSTITUTION:Several kinds of optical band-pass filters 4 are arranged in replacement with one another successively on a diffraction pattern image, and base on the output signals of a photoelectric transducer 5 according to a defective sample 1 obtained when respective optical band-pass filters are applied, S/N values are recorded on a recorder 6. Then, based on the data thus recorded, a place where the S/N value is the maximum, i.e. an optimum filter zone is selected, and thus the reference filter which makes it possible to catch various defects in an averaged manner is obtained.
JP1219180A 1980-02-04 1980-02-04 Manufacture of optical filter Pending JPS56110005A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1219180A JPS56110005A (en) 1980-02-04 1980-02-04 Manufacture of optical filter

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1219180A JPS56110005A (en) 1980-02-04 1980-02-04 Manufacture of optical filter

Publications (1)

Publication Number Publication Date
JPS56110005A true JPS56110005A (en) 1981-09-01

Family

ID=11798506

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1219180A Pending JPS56110005A (en) 1980-02-04 1980-02-04 Manufacture of optical filter

Country Status (1)

Country Link
JP (1) JPS56110005A (en)

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