JPS56108879A - Article having fine interface structure and method - Google Patents
Article having fine interface structure and methodInfo
- Publication number
- JPS56108879A JPS56108879A JP14115179A JP14115179A JPS56108879A JP S56108879 A JPS56108879 A JP S56108879A JP 14115179 A JP14115179 A JP 14115179A JP 14115179 A JP14115179 A JP 14115179A JP S56108879 A JPS56108879 A JP S56108879A
- Authority
- JP
- Japan
- Prior art keywords
- article
- interface structure
- fine interface
- fine
- interface
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- ing And Chemical Polishing (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US95702278A | 1978-11-01 | 1978-11-01 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS56108879A true JPS56108879A (en) | 1981-08-28 |
JPS6250555B2 JPS6250555B2 (enrdf_load_stackoverflow) | 1987-10-26 |
Family
ID=25498978
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14115179A Granted JPS56108879A (en) | 1978-11-01 | 1979-10-31 | Article having fine interface structure and method |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS56108879A (enrdf_load_stackoverflow) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010511079A (ja) * | 2006-11-30 | 2010-04-08 | フラウンホーファー−ゲゼルシャフト ツル フェルデルング デル アンゲヴァンテン フォルシュング エー ファウ | プラスチック表面にナノ構造を製造する方法 |
JP2014218686A (ja) * | 2013-05-01 | 2014-11-20 | デクセリアルズ株式会社 | エッチング製品の製造方法 |
-
1979
- 1979-10-31 JP JP14115179A patent/JPS56108879A/ja active Granted
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010511079A (ja) * | 2006-11-30 | 2010-04-08 | フラウンホーファー−ゲゼルシャフト ツル フェルデルング デル アンゲヴァンテン フォルシュング エー ファウ | プラスチック表面にナノ構造を製造する方法 |
KR101430561B1 (ko) * | 2006-11-30 | 2014-08-14 | 프라운호퍼-게젤샤프트 츄어 푀르더룽 데어 안게반텐 포르슝에.파우. | 플라스틱 기판 표면 상에 나노 구조물을 제조하기 위한 방법 |
JP2014218686A (ja) * | 2013-05-01 | 2014-11-20 | デクセリアルズ株式会社 | エッチング製品の製造方法 |
Also Published As
Publication number | Publication date |
---|---|
JPS6250555B2 (enrdf_load_stackoverflow) | 1987-10-26 |
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