JPS5610740B2 - - Google Patents
Info
- Publication number
- JPS5610740B2 JPS5610740B2 JP4944375A JP4944375A JPS5610740B2 JP S5610740 B2 JPS5610740 B2 JP S5610740B2 JP 4944375 A JP4944375 A JP 4944375A JP 4944375 A JP4944375 A JP 4944375A JP S5610740 B2 JPS5610740 B2 JP S5610740B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP50049443A JPS51124371A (en) | 1975-04-23 | 1975-04-23 | Scanning type electron microscope and similar equipment provided with means for controlling opening angle of electron beam for irradiating s amples |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP50049443A JPS51124371A (en) | 1975-04-23 | 1975-04-23 | Scanning type electron microscope and similar equipment provided with means for controlling opening angle of electron beam for irradiating s amples |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS51124371A JPS51124371A (en) | 1976-10-29 |
| JPS5610740B2 true JPS5610740B2 (OSRAM) | 1981-03-10 |
Family
ID=12831254
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP50049443A Granted JPS51124371A (en) | 1975-04-23 | 1975-04-23 | Scanning type electron microscope and similar equipment provided with means for controlling opening angle of electron beam for irradiating s amples |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS51124371A (OSRAM) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63277364A (ja) * | 1987-05-01 | 1988-11-15 | 工業繊維株式会社 | 床敷き材 |
| JPH08138600A (ja) * | 1994-11-04 | 1996-05-31 | Shimadzu Corp | 荷電粒子光学系 |
| JP2007109431A (ja) * | 2005-10-11 | 2007-04-26 | Shimadzu Corp | 電子ビーム制御装置 |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5378164A (en) * | 1976-12-22 | 1978-07-11 | Jeol Ltd | Scanning electronic microscope and its equivalent unit |
| JPS59170753A (ja) * | 1983-03-17 | 1984-09-27 | Jeol Ltd | 電子線回折装置 |
| JPS60193248A (ja) * | 1984-03-15 | 1985-10-01 | Internatl Precision Inc | 電子線装置の電子線照射方法 |
| JPS614142A (ja) * | 1984-06-16 | 1986-01-10 | Jeol Ltd | 電子顕微鏡 |
| JPS6119046A (ja) * | 1984-07-04 | 1986-01-27 | Hitachi Ltd | 収束電子線回折用電子顕微鏡 |
| JPS6171539A (ja) * | 1984-09-13 | 1986-04-12 | Internatl Precision Inc | 電子線装置の照射系 |
| JPS6199257A (ja) * | 1984-10-22 | 1986-05-17 | Internatl Precision Inc | 電子線装置の照射系 |
| JPS6261252A (ja) * | 1985-09-12 | 1987-03-17 | Jeol Ltd | 電子顕微鏡の照射レンズ装置 |
| JPH0766766B2 (ja) * | 1989-03-30 | 1995-07-19 | 株式会社日立製作所 | 電子顕微鏡 |
-
1975
- 1975-04-23 JP JP50049443A patent/JPS51124371A/ja active Granted
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63277364A (ja) * | 1987-05-01 | 1988-11-15 | 工業繊維株式会社 | 床敷き材 |
| JPH08138600A (ja) * | 1994-11-04 | 1996-05-31 | Shimadzu Corp | 荷電粒子光学系 |
| JP2007109431A (ja) * | 2005-10-11 | 2007-04-26 | Shimadzu Corp | 電子ビーム制御装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS51124371A (en) | 1976-10-29 |