JPS56101753A - External inspecting machine for silicon wafer - Google Patents
External inspecting machine for silicon waferInfo
- Publication number
- JPS56101753A JPS56101753A JP393780A JP393780A JPS56101753A JP S56101753 A JPS56101753 A JP S56101753A JP 393780 A JP393780 A JP 393780A JP 393780 A JP393780 A JP 393780A JP S56101753 A JPS56101753 A JP S56101753A
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- indexing mechanism
- recording
- magazine indexing
- silicon wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/26—Testing of individual semiconductor devices
- G01R31/265—Contactless testing
- G01R31/2656—Contactless testing using non-ionising electromagnetic radiation, e.g. optical radiation
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Electromagnetism (AREA)
- Toxicology (AREA)
- General Physics & Mathematics (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Abstract
PURPOSE:To accurately and automatically discriminate the propriety of the silicon wafer by displaying the inspected result of the Si wafer by a microscope on a display unit, recording it in a magnetic memory and recording it in a motor-driven printer. CONSTITUTION:A wafer supply magazine indexing mechanism 102, a good wafer containing magazine indexing mechanism 103, regenerated wafer containing magazine indexing mechanism 104 and an improper wafer containing magazine indexing mechanism 105 are provided on a substrate 101 having an operation panel 109 having a keyboard 110 for controlling the focus of a microscope 1 the wafer is operated by the first magnetic memroy for recording the program of the wafer inspecting position and the program of the type of the defect, the inspected result is indicated on the display unit 108, recorded simultaneously on the second magnetic memory, the respective wafers are transferred to the respective magazines on the basis of the discrimination of the propriety, and the results are displayed on the motor driven printed as required. Thus, the inspecting work can be automated to be accurate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP393780A JPS56101753A (en) | 1980-01-17 | 1980-01-17 | External inspecting machine for silicon wafer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP393780A JPS56101753A (en) | 1980-01-17 | 1980-01-17 | External inspecting machine for silicon wafer |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS56101753A true JPS56101753A (en) | 1981-08-14 |
Family
ID=11571041
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP393780A Pending JPS56101753A (en) | 1980-01-17 | 1980-01-17 | External inspecting machine for silicon wafer |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS56101753A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60148136A (en) * | 1984-01-12 | 1985-08-05 | Toshiba Corp | Semiconductor testing device |
| US4999578A (en) * | 1988-01-20 | 1991-03-12 | Nec Home Electronics Ltd. | Function inspecting system |
-
1980
- 1980-01-17 JP JP393780A patent/JPS56101753A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60148136A (en) * | 1984-01-12 | 1985-08-05 | Toshiba Corp | Semiconductor testing device |
| US4999578A (en) * | 1988-01-20 | 1991-03-12 | Nec Home Electronics Ltd. | Function inspecting system |
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