JPS5598447A - Scanning electron microscope or its similar device - Google Patents

Scanning electron microscope or its similar device

Info

Publication number
JPS5598447A
JPS5598447A JP483379A JP483379A JPS5598447A JP S5598447 A JPS5598447 A JP S5598447A JP 483379 A JP483379 A JP 483379A JP 483379 A JP483379 A JP 483379A JP S5598447 A JPS5598447 A JP S5598447A
Authority
JP
Japan
Prior art keywords
sample
live body
detector
microscope
main body
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP483379A
Other languages
Japanese (ja)
Inventor
Kimio Kanda
Tadashi Otaka
Minoru Shimizu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP483379A priority Critical patent/JPS5598447A/en
Publication of JPS5598447A publication Critical patent/JPS5598447A/en
Pending legal-status Critical Current

Links

Landscapes

  • Analysing Materials By The Use Of Radiation (AREA)
  • Measurement Of Radiation (AREA)

Abstract

PURPOSE: To make it possible to shield any live body from radioactive rays out of a sample for them without downslide of performance in microscope, etc. by covering the main body part with a separate live body shielding box.
CONSTITUTION: A scanning electron microscope or similar device, such as X ray microanalyzer, etc. comprises an electron gun 1, an optical system 2, a sample chamber 3, a sample stand 4, a detector 5 and an exhaust system 6 to be involved in the main body part and a display part 7, the entire main body part is covered with a live body shielding box 8 with use of iron, lead, etc. By doing so, it is sufficient but to think of being shielded from β rays, γ rays out of the detector (for instance, secondary electron detector, etc.) and it is all right with a structure close to almost standard type around the sample chamber. In consequence, without downslide of performance in microscope, etc., it is feasible to effectuate shielding any live body from radioactive rays out of the sample.
COPYRIGHT: (C)1980,JPO&Japio
JP483379A 1979-01-22 1979-01-22 Scanning electron microscope or its similar device Pending JPS5598447A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP483379A JPS5598447A (en) 1979-01-22 1979-01-22 Scanning electron microscope or its similar device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP483379A JPS5598447A (en) 1979-01-22 1979-01-22 Scanning electron microscope or its similar device

Publications (1)

Publication Number Publication Date
JPS5598447A true JPS5598447A (en) 1980-07-26

Family

ID=11594687

Family Applications (1)

Application Number Title Priority Date Filing Date
JP483379A Pending JPS5598447A (en) 1979-01-22 1979-01-22 Scanning electron microscope or its similar device

Country Status (1)

Country Link
JP (1) JPS5598447A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4664477A (en) * 1984-05-14 1987-05-12 Compagnie Generale Des Matieres Nucleaires (Cogema) Shielded air-tight enclosure equipped for use in emission spectrometry

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4664477A (en) * 1984-05-14 1987-05-12 Compagnie Generale Des Matieres Nucleaires (Cogema) Shielded air-tight enclosure equipped for use in emission spectrometry

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