JPS5590942A - Positive type resist material - Google Patents
Positive type resist materialInfo
- Publication number
- JPS5590942A JPS5590942A JP16230278A JP16230278A JPS5590942A JP S5590942 A JPS5590942 A JP S5590942A JP 16230278 A JP16230278 A JP 16230278A JP 16230278 A JP16230278 A JP 16230278A JP S5590942 A JPS5590942 A JP S5590942A
- Authority
- JP
- Japan
- Prior art keywords
- copolymer
- positive type
- resist material
- type resist
- meth
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Compositions Of Macromolecular Compounds (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16230278A JPS5590942A (en) | 1978-12-29 | 1978-12-29 | Positive type resist material |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16230278A JPS5590942A (en) | 1978-12-29 | 1978-12-29 | Positive type resist material |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5590942A true JPS5590942A (en) | 1980-07-10 |
JPS5654622B2 JPS5654622B2 (ja) | 1981-12-26 |
Family
ID=15751909
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP16230278A Granted JPS5590942A (en) | 1978-12-29 | 1978-12-29 | Positive type resist material |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5590942A (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02197846A (ja) * | 1989-01-26 | 1990-08-06 | Toray Ind Inc | 感放射線ポジ型レジスト |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS49103632A (ja) * | 1972-12-21 | 1974-10-01 | Philips Nv | |
JPS51117577A (en) * | 1975-03-20 | 1976-10-15 | Philips Nv | Positive operation type electron resist |
JPS5344441A (en) * | 1976-10-04 | 1978-04-21 | Ibm | Material for resist |
JPS5376826A (en) * | 1976-12-20 | 1978-07-07 | Ibm | Method of forming regist image |
-
1978
- 1978-12-29 JP JP16230278A patent/JPS5590942A/ja active Granted
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS49103632A (ja) * | 1972-12-21 | 1974-10-01 | Philips Nv | |
JPS51117577A (en) * | 1975-03-20 | 1976-10-15 | Philips Nv | Positive operation type electron resist |
JPS5344441A (en) * | 1976-10-04 | 1978-04-21 | Ibm | Material for resist |
JPS5376826A (en) * | 1976-12-20 | 1978-07-07 | Ibm | Method of forming regist image |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02197846A (ja) * | 1989-01-26 | 1990-08-06 | Toray Ind Inc | 感放射線ポジ型レジスト |
Also Published As
Publication number | Publication date |
---|---|
JPS5654622B2 (ja) | 1981-12-26 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPS53143686A (en) | Modified ethylene-tetrafluoroethylene copolymer and its preparation | |
JPS5437184A (en) | Novel diallylphthalate curable compound, its preparation, and adhesive and paint containing resin therefrom | |
JPS5590942A (en) | Positive type resist material | |
FR2603133A1 (fr) | Element chauffant autoregulant et son procede de preparation | |
JPS51130936A (en) | Water heater utilizing solar heat | |
JPS51150751A (en) | A heated water producing equipment by taking advantage of solar heat | |
JPS5218239A (en) | Water heating equipment by applying solar heat | |
JPS5439494A (en) | Continuous preparation of poly-para-phenylene terephthalamide | |
JPS51139251A (en) | Method of manufacturing black heater | |
JPS5432556A (en) | Method of crosslinking olefinic polymer | |
JPS5285735A (en) | High-frequency heating apparatus | |
JPS5438342A (en) | Polyolefin composition | |
JPS5296093A (en) | Chromatograph | |
JPS5390356A (en) | Fluorine-containing copolymer composition | |
JPS5432476A (en) | Preparation of 3-aminopyridines | |
JPS53129244A (en) | Resin mix composition | |
JPS5333449A (en) | Heat exchanging tube | |
PT71875B (en) | Perfected process for stabilizing vinyl resins against itsdeterioration caused by both solar heat and light | |
JPS5248850A (en) | Auxiliary heating equipment for a water heater applying the solar heat | |
JPS5239952A (en) | Heating combustor | |
JPS5366032A (en) | High frequency heater | |
JPS5238557A (en) | Preparation of a synthetic resin | |
JPS51135592A (en) | Heating method of rubbing section of glass equipment | |
JPS52151384A (en) | Curable urethanated vinyl ester resin compositions | |
JPS526147A (en) | High frequency heater |