JPS5588809A - Filter provided with washing facility - Google Patents

Filter provided with washing facility

Info

Publication number
JPS5588809A
JPS5588809A JP16225778A JP16225778A JPS5588809A JP S5588809 A JPS5588809 A JP S5588809A JP 16225778 A JP16225778 A JP 16225778A JP 16225778 A JP16225778 A JP 16225778A JP S5588809 A JPS5588809 A JP S5588809A
Authority
JP
Japan
Prior art keywords
filter
fluid
washing
washing fluid
nozzles
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16225778A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6155402B2 (enrdf_load_stackoverflow
Inventor
Yoshito Yoshimura
Mikio Takeuchi
Tetsuo Kamata
Toshikatsu Ishida
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
JSR Corp
Original Assignee
Japan Synthetic Rubber Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Japan Synthetic Rubber Co Ltd filed Critical Japan Synthetic Rubber Co Ltd
Priority to JP16225778A priority Critical patent/JPS5588809A/ja
Publication of JPS5588809A publication Critical patent/JPS5588809A/ja
Publication of JPS6155402B2 publication Critical patent/JPS6155402B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Filtration Of Liquid (AREA)
JP16225778A 1978-12-28 1978-12-28 Filter provided with washing facility Granted JPS5588809A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16225778A JPS5588809A (en) 1978-12-28 1978-12-28 Filter provided with washing facility

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16225778A JPS5588809A (en) 1978-12-28 1978-12-28 Filter provided with washing facility

Publications (2)

Publication Number Publication Date
JPS5588809A true JPS5588809A (en) 1980-07-04
JPS6155402B2 JPS6155402B2 (enrdf_load_stackoverflow) 1986-11-27

Family

ID=15750987

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16225778A Granted JPS5588809A (en) 1978-12-28 1978-12-28 Filter provided with washing facility

Country Status (1)

Country Link
JP (1) JPS5588809A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100426898B1 (ko) * 2001-05-31 2004-04-13 강남필터 주식회사 회전분사식 자동세정형 분사파이프를 구비한 에어필터시스템
JP2009182328A (ja) * 2008-01-29 2009-08-13 Asml Holding Nv 液浸リソグラフィ装置

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62259921A (ja) * 1986-05-02 1987-11-12 Hitachi Ltd 気密ボツクス施設

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51117367A (en) * 1975-04-08 1976-10-15 Kurita Mach Mfg Co Ltd Method of filtering in filter press
JPS5213168A (en) * 1975-07-22 1977-02-01 Akimoto Sogabe Filtering apparatus for continous cleaning of filtering cloth
JPS5341786U (enrdf_load_stackoverflow) * 1976-09-14 1978-04-11
JPS5361781U (enrdf_load_stackoverflow) * 1976-10-27 1978-05-25
JPS53105976U (enrdf_load_stackoverflow) * 1977-01-31 1978-08-25

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51117367A (en) * 1975-04-08 1976-10-15 Kurita Mach Mfg Co Ltd Method of filtering in filter press
JPS5213168A (en) * 1975-07-22 1977-02-01 Akimoto Sogabe Filtering apparatus for continous cleaning of filtering cloth
JPS5341786U (enrdf_load_stackoverflow) * 1976-09-14 1978-04-11
JPS5361781U (enrdf_load_stackoverflow) * 1976-10-27 1978-05-25
JPS53105976U (enrdf_load_stackoverflow) * 1977-01-31 1978-08-25

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100426898B1 (ko) * 2001-05-31 2004-04-13 강남필터 주식회사 회전분사식 자동세정형 분사파이프를 구비한 에어필터시스템
JP2009182328A (ja) * 2008-01-29 2009-08-13 Asml Holding Nv 液浸リソグラフィ装置

Also Published As

Publication number Publication date
JPS6155402B2 (enrdf_load_stackoverflow) 1986-11-27

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