JPS5582058A - Initial setting method for plasma measuring integrator - Google Patents

Initial setting method for plasma measuring integrator

Info

Publication number
JPS5582058A
JPS5582058A JP15492578A JP15492578A JPS5582058A JP S5582058 A JPS5582058 A JP S5582058A JP 15492578 A JP15492578 A JP 15492578A JP 15492578 A JP15492578 A JP 15492578A JP S5582058 A JPS5582058 A JP S5582058A
Authority
JP
Japan
Prior art keywords
integrator
plasma current
open instruction
circuit
produce
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15492578A
Other languages
English (en)
Inventor
Toshio Yamagishi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP15492578A priority Critical patent/JPS5582058A/ja
Publication of JPS5582058A publication Critical patent/JPS5582058A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Measurement Of Current Or Voltage (AREA)
  • Plasma Technology (AREA)
JP15492578A 1978-12-18 1978-12-18 Initial setting method for plasma measuring integrator Pending JPS5582058A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15492578A JPS5582058A (en) 1978-12-18 1978-12-18 Initial setting method for plasma measuring integrator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15492578A JPS5582058A (en) 1978-12-18 1978-12-18 Initial setting method for plasma measuring integrator

Publications (1)

Publication Number Publication Date
JPS5582058A true JPS5582058A (en) 1980-06-20

Family

ID=15594939

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15492578A Pending JPS5582058A (en) 1978-12-18 1978-12-18 Initial setting method for plasma measuring integrator

Country Status (1)

Country Link
JP (1) JPS5582058A (ja)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57139874U (ja) * 1981-02-27 1982-09-01
JPS5963571A (ja) * 1982-07-13 1984-04-11 シ−メンス・アクチエンゲゼルシヤフト 交流電圧の積分装置
JPS6019972U (ja) * 1983-07-20 1985-02-12 コメツト株式会社 パルス電流検出回路
JP2000058296A (ja) * 1998-08-06 2000-02-25 Foi:Kk プラズマ処理装置

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57139874U (ja) * 1981-02-27 1982-09-01
JPS5963571A (ja) * 1982-07-13 1984-04-11 シ−メンス・アクチエンゲゼルシヤフト 交流電圧の積分装置
JPS6019972U (ja) * 1983-07-20 1985-02-12 コメツト株式会社 パルス電流検出回路
JP2000058296A (ja) * 1998-08-06 2000-02-25 Foi:Kk プラズマ処理装置

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