JPS5579865A - Ion implanting method - Google Patents
Ion implanting methodInfo
- Publication number
- JPS5579865A JPS5579865A JP15338478A JP15338478A JPS5579865A JP S5579865 A JPS5579865 A JP S5579865A JP 15338478 A JP15338478 A JP 15338478A JP 15338478 A JP15338478 A JP 15338478A JP S5579865 A JPS5579865 A JP S5579865A
- Authority
- JP
- Japan
- Prior art keywords
- samples
- angle
- temp
- electrodes
- rise
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/48—Ion implantation
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15338478A JPS5579865A (en) | 1978-12-06 | 1978-12-06 | Ion implanting method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15338478A JPS5579865A (en) | 1978-12-06 | 1978-12-06 | Ion implanting method |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5579865A true JPS5579865A (en) | 1980-06-16 |
JPS5752952B2 JPS5752952B2 (ja) | 1982-11-10 |
Family
ID=15561289
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15338478A Granted JPS5579865A (en) | 1978-12-06 | 1978-12-06 | Ion implanting method |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5579865A (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4433247A (en) * | 1981-09-28 | 1984-02-21 | Varian Associates, Inc. | Beam sharing method and apparatus for ion implantation |
-
1978
- 1978-12-06 JP JP15338478A patent/JPS5579865A/ja active Granted
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4433247A (en) * | 1981-09-28 | 1984-02-21 | Varian Associates, Inc. | Beam sharing method and apparatus for ion implantation |
Also Published As
Publication number | Publication date |
---|---|
JPS5752952B2 (ja) | 1982-11-10 |
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