JPS557703B2 - - Google Patents
Info
- Publication number
- JPS557703B2 JPS557703B2 JP3110577A JP3110577A JPS557703B2 JP S557703 B2 JPS557703 B2 JP S557703B2 JP 3110577 A JP3110577 A JP 3110577A JP 3110577 A JP3110577 A JP 3110577A JP S557703 B2 JPS557703 B2 JP S557703B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Local Oxidation Of Silicon (AREA)
- Formation Of Insulating Films (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3110577A JPS53116779A (en) | 1977-03-23 | 1977-03-23 | Selective oxidation method of semiconductor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3110577A JPS53116779A (en) | 1977-03-23 | 1977-03-23 | Selective oxidation method of semiconductor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS53116779A JPS53116779A (en) | 1978-10-12 |
| JPS557703B2 true JPS557703B2 (enExample) | 1980-02-27 |
Family
ID=12322112
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3110577A Granted JPS53116779A (en) | 1977-03-23 | 1977-03-23 | Selective oxidation method of semiconductor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS53116779A (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01147915U (enExample) * | 1988-03-30 | 1989-10-13 |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE1923265B2 (de) * | 1969-05-07 | 1972-06-22 | Licentia Patent Verwaltungs GmbH, 6000 Frankfurt | Verfahren zum herstellen eines feldeffekttransistors mit isolierter steuerelektrode |
| JPS5188179A (en) * | 1975-01-31 | 1976-08-02 | cvd honyorusankamakunokeiseihoho |
-
1977
- 1977-03-23 JP JP3110577A patent/JPS53116779A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01147915U (enExample) * | 1988-03-30 | 1989-10-13 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS53116779A (en) | 1978-10-12 |