Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Light Metal Co Ltd
Original Assignee
Nippon Light Metal Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Light Metal Co LtdfiledCriticalNippon Light Metal Co Ltd
Priority to JP14906778ApriorityCriticalpatent/JPS6028599B2/ja
Publication of JPS5575896ApublicationCriticalpatent/JPS5575896A/ja
Publication of JPS6028599B2publicationCriticalpatent/JPS6028599B2/ja
Werkwijze en inrichting voor het afbeelden van een voorwerp met geringe vergroting met behulp van een corpusculair straalapparaat, in het bijzonder een electronenmicroscoop.