JPS5575618A - Measuring unit for physical quantity in vacuum vessel - Google Patents

Measuring unit for physical quantity in vacuum vessel

Info

Publication number
JPS5575618A
JPS5575618A JP14795478A JP14795478A JPS5575618A JP S5575618 A JPS5575618 A JP S5575618A JP 14795478 A JP14795478 A JP 14795478A JP 14795478 A JP14795478 A JP 14795478A JP S5575618 A JPS5575618 A JP S5575618A
Authority
JP
Japan
Prior art keywords
arm
bellows
vacuum vessel
sensor
air tight
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14795478A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6118963B2 (enrdf_load_stackoverflow
Inventor
Yasushi Aikawa
Toru Matoba
Taro Iwamoto
Moritomo Ando
Takashi Watanabe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Japan Atomic Energy Agency
Original Assignee
Hitachi Ltd
Japan Atomic Energy Research Institute
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd, Japan Atomic Energy Research Institute filed Critical Hitachi Ltd
Priority to JP14795478A priority Critical patent/JPS5575618A/ja
Publication of JPS5575618A publication Critical patent/JPS5575618A/ja
Publication of JPS6118963B2 publication Critical patent/JPS6118963B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Testing Or Calibration Of Command Recording Devices (AREA)
  • Plasma Technology (AREA)
JP14795478A 1978-12-01 1978-12-01 Measuring unit for physical quantity in vacuum vessel Granted JPS5575618A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14795478A JPS5575618A (en) 1978-12-01 1978-12-01 Measuring unit for physical quantity in vacuum vessel

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14795478A JPS5575618A (en) 1978-12-01 1978-12-01 Measuring unit for physical quantity in vacuum vessel

Publications (2)

Publication Number Publication Date
JPS5575618A true JPS5575618A (en) 1980-06-07
JPS6118963B2 JPS6118963B2 (enrdf_load_stackoverflow) 1986-05-15

Family

ID=15441829

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14795478A Granted JPS5575618A (en) 1978-12-01 1978-12-01 Measuring unit for physical quantity in vacuum vessel

Country Status (1)

Country Link
JP (1) JPS5575618A (enrdf_load_stackoverflow)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4375170A (en) * 1981-03-27 1983-03-01 Beckman Instruments, Inc. Decontaminating fluid sensor mechanism
US5076108A (en) * 1990-08-23 1991-12-31 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administrator Probe insertion apparatus with inflatable seal
US5174165A (en) * 1990-08-13 1992-12-29 Westinghouse Electric Corp. Flexible delivery system for a rotatable probe
JP2006153672A (ja) * 2004-11-29 2006-06-15 Chemitoronics Co Ltd 圧力・温度分布計測システム

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4375170A (en) * 1981-03-27 1983-03-01 Beckman Instruments, Inc. Decontaminating fluid sensor mechanism
US5174165A (en) * 1990-08-13 1992-12-29 Westinghouse Electric Corp. Flexible delivery system for a rotatable probe
US5076108A (en) * 1990-08-23 1991-12-31 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administrator Probe insertion apparatus with inflatable seal
JP2006153672A (ja) * 2004-11-29 2006-06-15 Chemitoronics Co Ltd 圧力・温度分布計測システム

Also Published As

Publication number Publication date
JPS6118963B2 (enrdf_load_stackoverflow) 1986-05-15

Similar Documents

Publication Publication Date Title
JPS54159964A (en) Articulated arm type manipulator
JPS54159963A (en) Articulated arm type manipulator
JPS5575618A (en) Measuring unit for physical quantity in vacuum vessel
BE874287A (fr) Organe de remplissage de recipients a tube relevable d'evacuation d'air
JPS55120784A (en) Inspection test tube for clinical inspection
BE850616A (fr) Machine pour la fabrication de recipients a partir de tubes de verre
JPS5548596A (en) Arm mechanism of robot
GB8820294D0 (en) Colourimetric test tube with pretreatment region & indicating region
JPS54164348A (en) Vacuum cleaner provided with dust vessel
GB2021776A (en) Measuring gas flow
JPS569191A (en) Robot arm mechanism
JPS5344972A (en) Electric dust collector for test
JPS56104210A (en) Shape instrumentation apparatus of linear body
JPS5258355A (en) X-ray detecting unit for electronic microscope
GB1423679A (en) Apparatus for determining the position of a machine component
JPS5535294A (en) Bellows unit with indicator
JPS5210191A (en) Sample gas collecting bag
JPS5594769A (en) Suspension gas shroud device
JPS54122606A (en) Supporting device for rocking shoot
PT83787A (en) Improved process for the laboratory diagnosis of infections caused by htlv 222 virus in particular
JPS5517890A (en) Cassette tape recorder
FR2338904A1 (fr) Machine perfectionnee pour la fabrication de recipients a partir de tubes de verre
JPS5798162A (en) Guide arm for high speed access
JPS5350660A (en) Flat type package for display unit
JPS55116048A (en) Damper device for airconditioning