JPS5575279A - Laser oscillator - Google Patents

Laser oscillator

Info

Publication number
JPS5575279A
JPS5575279A JP14985678A JP14985678A JPS5575279A JP S5575279 A JPS5575279 A JP S5575279A JP 14985678 A JP14985678 A JP 14985678A JP 14985678 A JP14985678 A JP 14985678A JP S5575279 A JPS5575279 A JP S5575279A
Authority
JP
Japan
Prior art keywords
window
waveguide
laser
shielding member
laser oscillator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14985678A
Other languages
English (en)
Inventor
Hisao Ogiyu
Osamu Komiya
Yuji Ikuno
Takashi Tsukatani
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Olympus Corp
Original Assignee
Olympus Optical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Olympus Optical Co Ltd filed Critical Olympus Optical Co Ltd
Priority to JP14985678A priority Critical patent/JPS5575279A/ja
Publication of JPS5575279A publication Critical patent/JPS5575279A/ja
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/03—Constructional details of gas laser discharge tubes
    • H01S3/034—Optical devices within, or forming part of, the tube, e.g. windows, mirrors

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
  • Lasers (AREA)
JP14985678A 1978-12-04 1978-12-04 Laser oscillator Pending JPS5575279A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14985678A JPS5575279A (en) 1978-12-04 1978-12-04 Laser oscillator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14985678A JPS5575279A (en) 1978-12-04 1978-12-04 Laser oscillator

Publications (1)

Publication Number Publication Date
JPS5575279A true JPS5575279A (en) 1980-06-06

Family

ID=15484135

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14985678A Pending JPS5575279A (en) 1978-12-04 1978-12-04 Laser oscillator

Country Status (1)

Country Link
JP (1) JPS5575279A (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0275762U (ja) * 1988-11-29 1990-06-11
JP2009099575A (ja) * 2007-10-12 2009-05-07 Gigaphoton Inc ガスレーザ装置におけるウインドウ脱着装置
JP2014137303A (ja) * 2013-01-17 2014-07-28 Canon Inc 干渉計システム、リソグラフィー装置、それを用いた物品の製造方法

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0275762U (ja) * 1988-11-29 1990-06-11
JP2009099575A (ja) * 2007-10-12 2009-05-07 Gigaphoton Inc ガスレーザ装置におけるウインドウ脱着装置
JP2014137303A (ja) * 2013-01-17 2014-07-28 Canon Inc 干渉計システム、リソグラフィー装置、それを用いた物品の製造方法

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