JPS5570756A - Inspection method for surface deterioration for semiconductor unit - Google Patents
Inspection method for surface deterioration for semiconductor unitInfo
- Publication number
- JPS5570756A JPS5570756A JP14345478A JP14345478A JPS5570756A JP S5570756 A JPS5570756 A JP S5570756A JP 14345478 A JP14345478 A JP 14345478A JP 14345478 A JP14345478 A JP 14345478A JP S5570756 A JPS5570756 A JP S5570756A
- Authority
- JP
- Japan
- Prior art keywords
- high temperature
- moisture
- bias
- semiconductor
- test
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Testing Of Individual Semiconductor Devices (AREA)
- Testing Resistance To Weather, Investigating Materials By Mechanical Methods (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14345478A JPS5570756A (en) | 1978-11-22 | 1978-11-22 | Inspection method for surface deterioration for semiconductor unit |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14345478A JPS5570756A (en) | 1978-11-22 | 1978-11-22 | Inspection method for surface deterioration for semiconductor unit |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5570756A true JPS5570756A (en) | 1980-05-28 |
Family
ID=15339071
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14345478A Pending JPS5570756A (en) | 1978-11-22 | 1978-11-22 | Inspection method for surface deterioration for semiconductor unit |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5570756A (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102628788A (zh) * | 2011-06-09 | 2012-08-08 | 京东方科技集团股份有限公司 | 腐蚀阻挡层阻挡特性的检测结构及检测方法 |
-
1978
- 1978-11-22 JP JP14345478A patent/JPS5570756A/ja active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102628788A (zh) * | 2011-06-09 | 2012-08-08 | 京东方科技集团股份有限公司 | 腐蚀阻挡层阻挡特性的检测结构及检测方法 |
CN102628788B (zh) * | 2011-06-09 | 2014-05-07 | 京东方科技集团股份有限公司 | 腐蚀阻挡层阻挡特性的检测结构及检测方法 |
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