JPS5570756A - Inspection method for surface deterioration for semiconductor unit - Google Patents

Inspection method for surface deterioration for semiconductor unit

Info

Publication number
JPS5570756A
JPS5570756A JP14345478A JP14345478A JPS5570756A JP S5570756 A JPS5570756 A JP S5570756A JP 14345478 A JP14345478 A JP 14345478A JP 14345478 A JP14345478 A JP 14345478A JP S5570756 A JPS5570756 A JP S5570756A
Authority
JP
Japan
Prior art keywords
high temperature
moisture
bias
semiconductor
test
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14345478A
Other languages
English (en)
Inventor
Masakazu Sakimoto
Toshihiko Ogu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP14345478A priority Critical patent/JPS5570756A/ja
Publication of JPS5570756A publication Critical patent/JPS5570756A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Testing Of Individual Semiconductor Devices (AREA)
  • Testing Resistance To Weather, Investigating Materials By Mechanical Methods (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP14345478A 1978-11-22 1978-11-22 Inspection method for surface deterioration for semiconductor unit Pending JPS5570756A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14345478A JPS5570756A (en) 1978-11-22 1978-11-22 Inspection method for surface deterioration for semiconductor unit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14345478A JPS5570756A (en) 1978-11-22 1978-11-22 Inspection method for surface deterioration for semiconductor unit

Publications (1)

Publication Number Publication Date
JPS5570756A true JPS5570756A (en) 1980-05-28

Family

ID=15339071

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14345478A Pending JPS5570756A (en) 1978-11-22 1978-11-22 Inspection method for surface deterioration for semiconductor unit

Country Status (1)

Country Link
JP (1) JPS5570756A (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102628788A (zh) * 2011-06-09 2012-08-08 京东方科技集团股份有限公司 腐蚀阻挡层阻挡特性的检测结构及检测方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102628788A (zh) * 2011-06-09 2012-08-08 京东方科技集团股份有限公司 腐蚀阻挡层阻挡特性的检测结构及检测方法
CN102628788B (zh) * 2011-06-09 2014-05-07 京东方科技集团股份有限公司 腐蚀阻挡层阻挡特性的检测结构及检测方法

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