JPS557009B2 - - Google Patents
Info
- Publication number
- JPS557009B2 JPS557009B2 JP2331876A JP2331876A JPS557009B2 JP S557009 B2 JPS557009 B2 JP S557009B2 JP 2331876 A JP2331876 A JP 2331876A JP 2331876 A JP2331876 A JP 2331876A JP S557009 B2 JPS557009 B2 JP S557009B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Formation Of Insulating Films (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2331876A JPS52106679A (en) | 1976-03-05 | 1976-03-05 | Manufacturing method of semioconductor device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2331876A JPS52106679A (en) | 1976-03-05 | 1976-03-05 | Manufacturing method of semioconductor device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS52106679A JPS52106679A (en) | 1977-09-07 |
| JPS557009B2 true JPS557009B2 (ja) | 1980-02-21 |
Family
ID=12107226
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2331876A Granted JPS52106679A (en) | 1976-03-05 | 1976-03-05 | Manufacturing method of semioconductor device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS52106679A (ja) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5617024A (en) * | 1979-07-20 | 1981-02-18 | Fujitsu Ltd | Semiconductor device |
| US4999317A (en) * | 1989-09-29 | 1991-03-12 | At&T Bell Laboratories | Metallization processing |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5222229B2 (ja) * | 1972-08-18 | 1977-06-16 |
-
1976
- 1976-03-05 JP JP2331876A patent/JPS52106679A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS52106679A (en) | 1977-09-07 |