JPS5567166U - - Google Patents
Info
- Publication number
- JPS5567166U JPS5567166U JP14818178U JP14818178U JPS5567166U JP S5567166 U JPS5567166 U JP S5567166U JP 14818178 U JP14818178 U JP 14818178U JP 14818178 U JP14818178 U JP 14818178U JP S5567166 U JPS5567166 U JP S5567166U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14818178U JPS5567166U (ja) | 1978-10-30 | 1978-10-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14818178U JPS5567166U (ja) | 1978-10-30 | 1978-10-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5567166U true JPS5567166U (ja) | 1980-05-09 |
Family
ID=29130331
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14818178U Pending JPS5567166U (ja) | 1978-10-30 | 1978-10-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5567166U (ja) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5921661U (ja) * | 1982-07-28 | 1984-02-09 | 日本真空技術株式会社 | スパツタリングカソ−ド |
| JP2010163639A (ja) * | 2009-01-13 | 2010-07-29 | Showa Denko Kk | スパッタリング装置及びそれを用いた磁気記録媒体の製造方法 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5337588A (en) * | 1976-09-21 | 1978-04-06 | Toshiba Corp | Sputtering electrode |
| JPS5347384A (en) * | 1976-10-13 | 1978-04-27 | Nec Corp | Sputtering apparatus |
-
1978
- 1978-10-30 JP JP14818178U patent/JPS5567166U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5337588A (en) * | 1976-09-21 | 1978-04-06 | Toshiba Corp | Sputtering electrode |
| JPS5347384A (en) * | 1976-10-13 | 1978-04-27 | Nec Corp | Sputtering apparatus |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5921661U (ja) * | 1982-07-28 | 1984-02-09 | 日本真空技術株式会社 | スパツタリングカソ−ド |
| JP2010163639A (ja) * | 2009-01-13 | 2010-07-29 | Showa Denko Kk | スパッタリング装置及びそれを用いた磁気記録媒体の製造方法 |