JPS5556011A - Production of boron structural material - Google Patents

Production of boron structural material

Info

Publication number
JPS5556011A
JPS5556011A JP12911878A JP12911878A JPS5556011A JP S5556011 A JPS5556011 A JP S5556011A JP 12911878 A JP12911878 A JP 12911878A JP 12911878 A JP12911878 A JP 12911878A JP S5556011 A JPS5556011 A JP S5556011A
Authority
JP
Japan
Prior art keywords
boron
substrate
layer
structural material
forming
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12911878A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6149247B2 (enExample
Inventor
Hiroshi Yamazoe
Masaki Aoki
Shigeru Yoshida
Masahiro Nagasawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP12911878A priority Critical patent/JPS5556011A/ja
Publication of JPS5556011A publication Critical patent/JPS5556011A/ja
Publication of JPS6149247B2 publication Critical patent/JPS6149247B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/01—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes on temporary substrates, e.g. substrates subsequently removed by etching

Landscapes

  • Chemical & Material Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
  • Physical Vapour Deposition (AREA)
JP12911878A 1978-10-19 1978-10-19 Production of boron structural material Granted JPS5556011A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12911878A JPS5556011A (en) 1978-10-19 1978-10-19 Production of boron structural material

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12911878A JPS5556011A (en) 1978-10-19 1978-10-19 Production of boron structural material

Publications (2)

Publication Number Publication Date
JPS5556011A true JPS5556011A (en) 1980-04-24
JPS6149247B2 JPS6149247B2 (enExample) 1986-10-28

Family

ID=15001509

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12911878A Granted JPS5556011A (en) 1978-10-19 1978-10-19 Production of boron structural material

Country Status (1)

Country Link
JP (1) JPS5556011A (enExample)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5216201A (en) * 1975-07-29 1977-02-07 Toshiba Corp Manufacturing method of pick-up cantilever

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5216201A (en) * 1975-07-29 1977-02-07 Toshiba Corp Manufacturing method of pick-up cantilever

Also Published As

Publication number Publication date
JPS6149247B2 (enExample) 1986-10-28

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