JPS5550340B1 - - Google Patents
Info
- Publication number
- JPS5550340B1 JPS5550340B1 JP3125771A JP3125771A JPS5550340B1 JP S5550340 B1 JPS5550340 B1 JP S5550340B1 JP 3125771 A JP3125771 A JP 3125771A JP 3125771 A JP3125771 A JP 3125771A JP S5550340 B1 JPS5550340 B1 JP S5550340B1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/18—Vacuum locks ; Means for obtaining or maintaining the desired pressure within the vessel
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Electron Sources, Ion Sources (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US7589970A | 1970-09-28 | 1970-09-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5550340B1 true JPS5550340B1 (de) | 1980-12-17 |
Family
ID=22128647
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3125771A Pending JPS5550340B1 (de) | 1970-09-28 | 1971-05-12 |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JPS5550340B1 (de) |
| DE (1) | DE2136250C2 (de) |
| FR (1) | FR2105788A5 (de) |
| GB (1) | GB1362535A (de) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4932627A (de) * | 1972-07-20 | 1974-03-25 |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2206415A (en) * | 1938-12-03 | 1940-07-02 | Rca Corp | Method of making electronic photomicrographs |
| US3509335A (en) * | 1967-06-26 | 1970-04-28 | William Charles Nixon | Electron microscope having two separate specimen stages |
-
1971
- 1971-05-12 JP JP3125771A patent/JPS5550340B1/ja active Pending
- 1971-06-22 FR FR7122652A patent/FR2105788A5/fr not_active Expired
- 1971-07-20 DE DE19712136250 patent/DE2136250C2/de not_active Expired
- 1971-09-28 GB GB4521671A patent/GB1362535A/en not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4932627A (de) * | 1972-07-20 | 1974-03-25 |
Also Published As
| Publication number | Publication date |
|---|---|
| DE2136250C2 (de) | 1982-11-25 |
| FR2105788A5 (de) | 1972-04-28 |
| DE2136250A1 (de) | 1972-03-30 |
| GB1362535A (en) | 1974-08-07 |