FR2105788A5 - - Google Patents

Info

Publication number
FR2105788A5
FR2105788A5 FR7122652A FR7122652A FR2105788A5 FR 2105788 A5 FR2105788 A5 FR 2105788A5 FR 7122652 A FR7122652 A FR 7122652A FR 7122652 A FR7122652 A FR 7122652A FR 2105788 A5 FR2105788 A5 FR 2105788A5
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR7122652A
Other languages
French (fr)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ETEC CORP
Original Assignee
ETEC CORP
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ETEC CORP filed Critical ETEC CORP
Application granted granted Critical
Publication of FR2105788A5 publication Critical patent/FR2105788A5/fr
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/18—Vacuum locks ; Means for obtaining or maintaining the desired pressure within the vessel
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
FR7122652A 1970-09-28 1971-06-22 Expired FR2105788A5 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US7589970A 1970-09-28 1970-09-28

Publications (1)

Publication Number Publication Date
FR2105788A5 true FR2105788A5 (de) 1972-04-28

Family

ID=22128647

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7122652A Expired FR2105788A5 (de) 1970-09-28 1971-06-22

Country Status (4)

Country Link
JP (1) JPS5550340B1 (de)
DE (1) DE2136250C2 (de)
FR (1) FR2105788A5 (de)
GB (1) GB1362535A (de)

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2206415A (en) * 1938-12-03 1940-07-02 Rca Corp Method of making electronic photomicrographs
US3509335A (en) * 1967-06-26 1970-04-28 William Charles Nixon Electron microscope having two separate specimen stages
JPS4932627A (de) * 1972-07-20 1974-03-25

Also Published As

Publication number Publication date
JPS5550340B1 (de) 1980-12-17
DE2136250C2 (de) 1982-11-25
GB1362535A (en) 1974-08-07
DE2136250A1 (de) 1972-03-30

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Legal Events

Date Code Title Description
ST Notification of lapse