JPS5549420B2 - - Google Patents
Info
- Publication number
- JPS5549420B2 JPS5549420B2 JP13698075A JP13698075A JPS5549420B2 JP S5549420 B2 JPS5549420 B2 JP S5549420B2 JP 13698075 A JP13698075 A JP 13698075A JP 13698075 A JP13698075 A JP 13698075A JP S5549420 B2 JPS5549420 B2 JP S5549420B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13698075A JPS5260566A (en) | 1975-11-13 | 1975-11-13 | Production of semiconductor device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13698075A JPS5260566A (en) | 1975-11-13 | 1975-11-13 | Production of semiconductor device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5260566A JPS5260566A (en) | 1977-05-19 |
| JPS5549420B2 true JPS5549420B2 (ja) | 1980-12-11 |
Family
ID=15187947
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13698075A Granted JPS5260566A (en) | 1975-11-13 | 1975-11-13 | Production of semiconductor device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5260566A (ja) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58147129A (ja) * | 1982-02-26 | 1983-09-01 | Nitto Electric Ind Co Ltd | 半導体ウエハの固定方法 |
| JPS6181652A (ja) * | 1984-09-28 | 1986-04-25 | Shin Etsu Polymer Co Ltd | ダイシングフイルム |
-
1975
- 1975-11-13 JP JP13698075A patent/JPS5260566A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5260566A (en) | 1977-05-19 |