JPS5549240U - - Google Patents

Info

Publication number
JPS5549240U
JPS5549240U JP13285178U JP13285178U JPS5549240U JP S5549240 U JPS5549240 U JP S5549240U JP 13285178 U JP13285178 U JP 13285178U JP 13285178 U JP13285178 U JP 13285178U JP S5549240 U JPS5549240 U JP S5549240U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13285178U
Other languages
Japanese (ja)
Other versions
JPS625646Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1978132851U priority Critical patent/JPS625646Y2/ja
Publication of JPS5549240U publication Critical patent/JPS5549240U/ja
Application granted granted Critical
Publication of JPS625646Y2 publication Critical patent/JPS625646Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP1978132851U 1978-09-29 1978-09-29 Expired JPS625646Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1978132851U JPS625646Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1978-09-29 1978-09-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1978132851U JPS625646Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1978-09-29 1978-09-29

Publications (2)

Publication Number Publication Date
JPS5549240U true JPS5549240U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1980-03-31
JPS625646Y2 JPS625646Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1987-02-09

Family

ID=29100779

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1978132851U Expired JPS625646Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1978-09-29 1978-09-29

Country Status (1)

Country Link
JP (1) JPS625646Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53107865A (en) * 1977-03-02 1978-09-20 Hitachi Ltd Detector of minute undulations

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53107865A (en) * 1977-03-02 1978-09-20 Hitachi Ltd Detector of minute undulations

Also Published As

Publication number Publication date
JPS625646Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1987-02-09

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