JPS5549157B2 - - Google Patents

Info

Publication number
JPS5549157B2
JPS5549157B2 JP742993A JP299374A JPS5549157B2 JP S5549157 B2 JPS5549157 B2 JP S5549157B2 JP 742993 A JP742993 A JP 742993A JP 299374 A JP299374 A JP 299374A JP S5549157 B2 JPS5549157 B2 JP S5549157B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP742993A
Other languages
Japanese (ja)
Other versions
JPS5092836A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP742993A priority Critical patent/JPS5549157B2/ja
Publication of JPS5092836A publication Critical patent/JPS5092836A/ja
Publication of JPS5549157B2 publication Critical patent/JPS5549157B2/ja
Expired legal-status Critical Current

Links

JP742993A 1973-12-20 1973-12-20 Expired JPS5549157B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP742993A JPS5549157B2 (en) 1973-12-20 1973-12-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP742993A JPS5549157B2 (en) 1973-12-20 1973-12-20

Publications (2)

Publication Number Publication Date
JPS5092836A JPS5092836A (en) 1975-07-24
JPS5549157B2 true JPS5549157B2 (en) 1980-12-10

Family

ID=11544889

Family Applications (1)

Application Number Title Priority Date Filing Date
JP742993A Expired JPS5549157B2 (en) 1973-12-20 1973-12-20

Country Status (1)

Country Link
JP (1) JPS5549157B2 (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5267988A (en) * 1975-12-04 1977-06-06 Matsushita Electric Ind Co Ltd Throuch-hole formation method
JPS6012380B2 (en) * 1976-07-20 1985-04-01 旭電化工業株式会社 Joint filling method
JPS5914550B2 (en) * 1976-07-20 1984-04-05 松下電器産業株式会社 Microfabrication method
JPS6143449A (en) * 1984-08-08 1986-03-03 Hitachi Ltd Forming process of wiring pattern

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3518084A (en) * 1967-01-09 1970-06-30 Ibm Method for etching an opening in an insulating layer without forming pinholes therein
US3700445A (en) * 1971-07-29 1972-10-24 Us Navy Photoresist processing method for fabricating etched microcircuits

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3518084A (en) * 1967-01-09 1970-06-30 Ibm Method for etching an opening in an insulating layer without forming pinholes therein
US3700445A (en) * 1971-07-29 1972-10-24 Us Navy Photoresist processing method for fabricating etched microcircuits

Also Published As

Publication number Publication date
JPS5092836A (en) 1975-07-24

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