JPS5092836A - - Google Patents
Info
- Publication number
- JPS5092836A JPS5092836A JP299374A JP299374A JPS5092836A JP S5092836 A JPS5092836 A JP S5092836A JP 299374 A JP299374 A JP 299374A JP 299374 A JP299374 A JP 299374A JP S5092836 A JPS5092836 A JP S5092836A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- ing And Chemical Polishing (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP742993A JPS5549157B2 (en) | 1973-12-20 | 1973-12-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP742993A JPS5549157B2 (en) | 1973-12-20 | 1973-12-20 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5092836A true JPS5092836A (en) | 1975-07-24 |
| JPS5549157B2 JPS5549157B2 (en) | 1980-12-10 |
Family
ID=11544889
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP742993A Expired JPS5549157B2 (en) | 1973-12-20 | 1973-12-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5549157B2 (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5267988A (en) * | 1975-12-04 | 1977-06-06 | Matsushita Electric Ind Co Ltd | Throuch-hole formation method |
| JPS5311845A (en) * | 1976-07-20 | 1978-02-02 | Matsushita Electric Ind Co Ltd | Minutely processing method |
| JPS5311953A (en) * | 1976-07-20 | 1978-02-02 | Asahi Denka Kogyo Kk | Method for filling joints |
| JPS6143449A (en) * | 1984-08-08 | 1986-03-03 | Hitachi Ltd | Forming process of wiring pattern |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3518084A (en) * | 1967-01-09 | 1970-06-30 | Ibm | Method for etching an opening in an insulating layer without forming pinholes therein |
| US3700445A (en) * | 1971-07-29 | 1972-10-24 | Us Navy | Photoresist processing method for fabricating etched microcircuits |
-
1973
- 1973-12-20 JP JP742993A patent/JPS5549157B2/ja not_active Expired
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3518084A (en) * | 1967-01-09 | 1970-06-30 | Ibm | Method for etching an opening in an insulating layer without forming pinholes therein |
| US3700445A (en) * | 1971-07-29 | 1972-10-24 | Us Navy | Photoresist processing method for fabricating etched microcircuits |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5267988A (en) * | 1975-12-04 | 1977-06-06 | Matsushita Electric Ind Co Ltd | Throuch-hole formation method |
| JPS5311845A (en) * | 1976-07-20 | 1978-02-02 | Matsushita Electric Ind Co Ltd | Minutely processing method |
| JPS5311953A (en) * | 1976-07-20 | 1978-02-02 | Asahi Denka Kogyo Kk | Method for filling joints |
| JPS5914550B2 (en) * | 1976-07-20 | 1984-04-05 | 松下電器産業株式会社 | Microfabrication method |
| JPS6012380B2 (en) * | 1976-07-20 | 1985-04-01 | 旭電化工業株式会社 | Joint filling method |
| JPS6143449A (en) * | 1984-08-08 | 1986-03-03 | Hitachi Ltd | Forming process of wiring pattern |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5549157B2 (en) | 1980-12-10 |