JPS5547952B2 - - Google Patents

Info

Publication number
JPS5547952B2
JPS5547952B2 JP234572A JP234572A JPS5547952B2 JP S5547952 B2 JPS5547952 B2 JP S5547952B2 JP 234572 A JP234572 A JP 234572A JP 234572 A JP234572 A JP 234572A JP S5547952 B2 JPS5547952 B2 JP S5547952B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP234572A
Other languages
Japanese (ja)
Other versions
JPS4872971A (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP234572A priority Critical patent/JPS5547952B2/ja
Publication of JPS4872971A publication Critical patent/JPS4872971A/ja
Publication of JPS5547952B2 publication Critical patent/JPS5547952B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
  • Cleaning In General (AREA)
  • Cleaning By Liquid Or Steam (AREA)
JP234572A 1971-12-29 1971-12-29 Expired JPS5547952B2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP234572A JPS5547952B2 (enrdf_load_stackoverflow) 1971-12-29 1971-12-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP234572A JPS5547952B2 (enrdf_load_stackoverflow) 1971-12-29 1971-12-29

Publications (2)

Publication Number Publication Date
JPS4872971A JPS4872971A (enrdf_load_stackoverflow) 1973-10-02
JPS5547952B2 true JPS5547952B2 (enrdf_load_stackoverflow) 1980-12-03

Family

ID=11526681

Family Applications (1)

Application Number Title Priority Date Filing Date
JP234572A Expired JPS5547952B2 (enrdf_load_stackoverflow) 1971-12-29 1971-12-29

Country Status (1)

Country Link
JP (1) JPS5547952B2 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6355113B1 (en) 1991-12-02 2002-03-12 3M Innovative Properties Company Multiple solvent cleaning system

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4056642A (en) * 1976-05-14 1977-11-01 Data General Corporation Method of fabricating metal-semiconductor interfaces
JPS5459081A (en) * 1977-10-20 1979-05-12 Toshiba Corp Surface treatment method for semiconductor element
JP2599122B2 (ja) * 1985-06-10 1997-04-09 ソニー株式会社 半導体装置の製造方法
CN100372076C (zh) * 2000-12-05 2008-02-27 东京毅力科创株式会社 被处理体的处理方法及处理装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6355113B1 (en) 1991-12-02 2002-03-12 3M Innovative Properties Company Multiple solvent cleaning system

Also Published As

Publication number Publication date
JPS4872971A (enrdf_load_stackoverflow) 1973-10-02

Similar Documents

Publication Publication Date Title
ATA136472A (enrdf_load_stackoverflow)
AR196074A1 (enrdf_load_stackoverflow)
JPS5547952B2 (enrdf_load_stackoverflow)
AU2658571A (enrdf_load_stackoverflow)
AU2684071A (enrdf_load_stackoverflow)
AU2564071A (enrdf_load_stackoverflow)
AU2485671A (enrdf_load_stackoverflow)
AU2941471A (enrdf_load_stackoverflow)
AU3005371A (enrdf_load_stackoverflow)
AU2952271A (enrdf_load_stackoverflow)
AU2456871A (enrdf_load_stackoverflow)
AU2486471A (enrdf_load_stackoverflow)
AU3025871A (enrdf_load_stackoverflow)
AU2669471A (enrdf_load_stackoverflow)
AU2654071A (enrdf_load_stackoverflow)
AU2588771A (enrdf_load_stackoverflow)
AU2577671A (enrdf_load_stackoverflow)
AU2907471A (enrdf_load_stackoverflow)
AU3038671A (enrdf_load_stackoverflow)
AR192311Q (enrdf_load_stackoverflow)
AU2503871A (enrdf_load_stackoverflow)
AU2415871A (enrdf_load_stackoverflow)
AU2473671A (enrdf_load_stackoverflow)
AU2940971A (enrdf_load_stackoverflow)
AU2938071A (enrdf_load_stackoverflow)